Design and coupled-effect simulations of CMOS micro gas-sensors built on SOI thin membranes

This paper describes coupled-effect simulations of smart micro gas-sensors based on standard BiCMOS technology. The smart sensor features very low power consumption, high sensitivity and potential low fabrication cost achieved through full CMOS integration. For the first time the micro heaters are made of active CMOS elements (i.e. MOSFET transistors) and embedded in a thin SOI membrane consisting of Si and SiO2 thin layers. Micro gas-sensors such as chemoresistive, microcalorimeteric and Pd/polymer gate FET sensors can be made using this technology. Full numerical analyses including 3D electro-thermo-mechanical simulations, in particular stress and deflection studies on the SOI membranes are presented. The transducer circuit design and the post-CMOS fabrication process, which includes single sided back-etching, are also reported.

Improving design quality and value in the built environment through knowledge of intangibles

Raising design quality and value in the built environment requires continuous improvement, drawing on feedback from clients or occupiers and other industry players. The challenging task for architectural and engineering designers has always been to use their intellectual knowledge to deliver both forms of benefits, tangibles and intangibles, in the built environment. Increasingly as clients demand best value for money, there is a greater need to understand the potential from intangibles, to see projects not as ends in themselves but as means to improved quality of life and wealth creation. As we begin to understand more about how - through the design of the built environment - to deliver these improvements in outcomes, clients will be better placed to expect their successful delivery from designers, and designers themselves will be better placed to provide them. This paper discusses cross-disciplinary issues about intangibles and is aimed at designers, clients, investors and entrepreneurs within the built environment. It presents some findings from a minuscule study that investigated intangible benefits in a new primary school. © 2004 IEEE.