Tribological properties of mems materials measured on a small-scale device

Micro-electro-mechanical systems, MEMS, is a rapidly growing interdisciplinary technology within the general field of Micro-Systems Technology which deals with the design and manufacture of miniaturised machines with major dimensions at the scale of tens, to perhaps hundreds, of microns. Because they depend on the cube of a representative dimension, component masses and inertias rapidly become small as size decreases whereas surface and tribological effects, which often depend on area, become increasingly important. Although MEMS components and their areas of contact are small, tribological conditions, measured by contact pressures or acceptable wear rates, are demanding and technical and commercial success will require careful measurement and precise control of surface topography and properties. Fabrication of small numbers of MEMS devices designed to test potential material combinations can be prohibitively expensive and thus there is a need for small scale test facilities which mimic the contact conditions within a micro-machine without themselves requiring processing within a full semiconductor foundry. The talk will illustrate some initial experimental results from a small-scale experimental device which meets these requirements, examining in particular the performance of Diamond-Like-Carbon coatings on a silicon substrate. Copyright © 2005 by ASME.

Wastage of low alloy steels in a fluidized bed environment

The wastage behaviour of four low alloy steels, suitable for use as evaporator tubing in industrial atmospheric fluidized bed combustors (AFBCs), was examined in a laboratory-scale test rig. Specimens exposed in the test apparatus experienced a high flux of impacts at low particle velocities similar to conditions in a FBC boiler. The influence of time, velocity and temperature on the wastage behaviour was examined and incubation times and velocity exponents were determined and their values discussed. Since high-temperature oxidation played an important role in this process, the short-term oxidation rate of each of the steels was measured. The mechanisms of material loss across the temperature range were discussed and the behaviour of the low alloy steels in the current work was compared with that of high alloy and stainless steels in earlier studies. © 1995.

Effect of bend orientation on life and puncture point location due to solid particle erosion of a high concentration flow in pneumatic conveyors

An investigation into predicting failure of pneumatic conveyor pipe bends due to hard solid particle impact erosion has been carried out on an industrial scale test rig. The bend puncture point locations may vary with many factors. However, bend orientation was suspected of being a main factor due to the biased particle distribution pattern of a high concentration flow. In this paper, puncture point locations have been studied with different pipe bend orientations and geometry (a solids loading ratio of 10 being used for the high concentration flow). Test results confirmed that the puncture point location is indeed most significantly influenced by the bend orientation (especially for a high concentration flow) due to the biased particle distribution and biased particle flux distribution. © 2004 Elsevier B.V. All rights reserved.

Effect of particle concentration on erosion rate of mild steel bends in a pneumatic conveyor

Particle concentration is known as a main factor that affects erosion rate of pipe bends in pneumatic conveyors. With consideration of different bend radii, the effect of particle concentration on weight loss of mild steel bends has been investigated in an industrial scale test rig. Experimental results show that there was a significant reduction of the specific erosion rate for high particle concentrations. This reduction was considered to be as a result of the shielding effect during the particle impacts. An empirical model is given. Also a theoretical study of scaling on the shielding effect, and comparisons with some existing models, are presented. It is found that the reduction in specific erosion rate (relative to particle concentration) has a stronger relationship in conveying pipelines than has been found in the erosion tester. © 2004 Elsevier B.V. All rights reserved.

Sensitivity of wear rates in the micro-scale abrasion test to test conditions and material hardness

Micro-scale abrasion (ball cratering) tests were performed with different combinations of ball and bulk specimen materials, under different test conditions, such as load and abrasive slurry concentration. Wear modes were classified into two types: with rolling particle motion and with grooving particle motion. Wear rates observed with rolling particle motion were relatively insensitive to test conditions, whereas with grooving motion they varied much more. It is suggested that rolling abrasion is therefore a more appropriate mode if reproducible test results are desired. The motion of the abrasive particles can be reliably predicted from the knowledge of hardnesses and elastic properties of the ball and the specimen, and from the normal load and the abrasive slurry concentration. General trends in wear resistance measured in the micro-scale abrasion test with rolling particle motion are similar to those reported in tests with fixed abrasives with sliding particle motion, although the variation in wear resistance with hardness is significantly smaller. © 2004 Published by Elsevier B.V.

Sources of variability in the free-ball micro-scale abrasion test

In the 'free-ball' version of the micro-scale abrasion or ball-cratering test the rotating ball rests against a tilted sample and a grooved drive shaft. Tests under nominally identical conditions with different apparatus commonly show small but significant differences in measured wear rate. An indirect method has been developed and demonstrated for continuous on-line measurement of the coefficient of friction in the free-ball test. Experimental investigation of the effects of sample tilt angle and drive shaft groove width shows that both these factors influence the stability of the rotation of the ball, and the shape of the abrasive slurry pool, which in turn affect the coefficient of friction in the wear scar area and the measured wear rate. It is suggested that in order to improve the reproducibility of this method the geometry of the apparatus should be specified. For the apparatus used in this work with a steel ball of 25 mm diameter, a sample tilt angle of 60-75° and a shaft groove width of about 10mm provided the most stable ball motion and a wear rate which showed least variability. © 2004 Elsevier B.V. All rights reserved.