8 resultados para beam quality
em Cambridge University Engineering Department Publications Database
Resumo:
It becomes increasingly difficult to make continuous metal lines with well defined thickness and edges by the lift-off technique as the line width is decreased. We describe in this paper a technique in which the combination of high resolution electron beam lithography and ionized cluster beam (ICB) deposition has enabled very high quality gold lines ({all equal to}25nm wide) to be obtained on thick single crystal silicon substrates. © 1990.
Resumo:
The measurement of high speed laser beam parameters during processing is a topic that has seen growing attention over the last few years as quality assurance places greater demand on the monitoring of the manufacturing process. The targets for any monitoring system is to be non-intrusive, low cost, simple to operate, high speed and capable of operation in process. A new ISO compliant system is presented based on the integration of an imaging plate and camera located behind a proprietary mirror sampling device. The general layout of the device is presented along with the thermal and optical performance of the sampling optic. Diagnostic performance of the system is compared with industry standard devices, demonstrating the high quality high speed data which has been generated using this system.
Resumo:
The crystal quality of 0.3-μm-thick as-grown epitaxial silicon-on-sapphire (SOS) was improved using solid-phase epitaxy (SPE) by implantation with silicon to 1015 ions/cm2 at 175 keV and rapid annealing using electron-beam heating, n-channel and p-channel transistormobilities increased by 31 and 19 percent, respectively, and a reduction in ring-oscillator stage delay confirmed that crystal defects near the upper silicon surface had been removed. Leakage in n-channel transistors was not significantly affected by the regrowth process but for p-channel transistors back-channel leakage was considerably greater than for the control devices. This is attributed to aluminum released by damage to the sapphire during silicon implantation. © 1985 IEEE
Resumo:
Ultrasound elastography tracks tissue displacements under small levels of compression to obtain images of strain, a mechanical property useful in the detection and characterization of pathology. Due to the nature of ultrasound beamforming, only tissue displacements in the direction of beam propagation, referred to as 'axial', are measured to high quality, although an ability to measure other components of tissue displacement is desired to more fully characterize the mechanical behavior of tissue. Previous studies have used multiple one-dimensional (1D) angled axial displacements tracked from steered ultrasound beams to reconstruct improved quality trans-axial displacements within the scan plane ('lateral'). We show that two-dimensional (2D) displacement tracking is not possible with unmodified electronically-steered ultrasound data, and present a method of reshaping frames of steered ultrasound data to retain axial-lateral orthogonality, which permits 2D displacement tracking. Simulated and experimental ultrasound data are used to compare changes in image quality of lateral displacements reconstructed using 1D and 2D tracked steered axial and steered lateral data. Reconstructed lateral displacement image quality generally improves with the use of 2D displacement tracking at each steering angle, relative to axial tracking alone, particularly at high levels of compression. Due to the influence of tracking noise, unsteered lateral displacements exhibit greater accuracy than axial-based reconstructions at high levels of applied strain. © 2011 SPIE.