Fibre laser microvia drilling and ablation of Si with tuneable pulse shapes

The dramatic increase in hole quality on single crystalline silicon with an 1 μm fiber laser has been reported recently, it redefines the processing options for Si at that wavelength. This study investigated the effects of the MOPA based pulse tuning on the changes of the machined depth and the mass removal mechanism for the generation of microvia holes. Hole depths were measured and surface morphology studied using SEM and optical interferometric profilometry. The pulse peak power was found to strongly influence the material removal mechanism with fixed pulse duration. High peak powers (>1 kW) gave vaporization dominated ablation, left a limited re solidified molten layer and clean hole formation. The pulse duration was found to strongly influence the machined depth. Longer pulse durations generated deeper holes with constant peak power (>1 kW). In comparison with the DPSS UV laser, the IR fiber laser of longer pulse durations machined deeper holes and generated less resolidifed melt beyond the hole rim at high fluencies. The comparison suggests that some applications (microvia drilling) of the DPSS UV laser can be replaced with the more flexible, low cost IR fiber laser. © KSPE and Springer 2012.

Structure of cryogenic flames at elevated pressures

This paper presents new experimental results on cryogenic jet flames formed by a coaxial injector at a pressure of 70 bar, which approaches the pressures found in rocket engines. This element, fed with liquid oxygen and gaseous hydrogen, is placed in a square combustion chamber equipped with quartz windows. The flame is examined via spectroscopy, OH* emission, and backlighting, the aim being to provide basic information on the flame structure. It is found that some of the OH* emission is absorbed by the OH radicals present in the flame. A detailed examination of this effect is presented, in which it is shown that, for this turbulent flame, the Abel transform gives the position of the intense reaction region, whether or not absorption is signficant. The flame is attached to the oxygen injector, as at low pressure. At high pressure, flame expansion is reduced compared with low pressure and is also less dependent on the momentum flux ratio between the hydrogen and the oxygen streams. An analysis of the relevant Damköhler numbers suggests that this is because the rate of combustion is mainly controlled by large-scale turbulent mixing at high pressure, and it is dominated by jet break-up, atomization, and vaporization at low pressures. Jet break-up is particularly dependent on the momentum flux ratio. Finally, the mean volumetric heat release rates and flame surface density in the experimental facility are estimated.