Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology

This paper describes multiple field-coupled simulations and device characterization of fully CMOS-MEMS-compatible smart gas sensors. The sensor structure is designated for gas/vapour detection at high temperatures (>300 °C) with low power consumption, high sensitivity and competent mechanic robustness employing the silicon-on-insulator (SOI) wafer technology, CMOS process and micromachining techniques. The smart gas sensor features micro-heaters using p-type MOSFETs or polysilicon resistors and differentially transducing circuits for in situ temperature measurement. Physical models and 3D electro-thermo-mechanical simulations of the SOI micro-hotplate induced by Joule, self-heating, mechanic stress and piezoresistive effects are provided. The electro-thermal effect initiates and thus affects electronic and mechanical characteristics of the sensor devices at high temperatures. Experiments on variation and characterization of micro-heater resistance, power consumption, thermal imaging, deformation interferometry and dynamic thermal response of the SOI micro-hotplate have been presented and discussed. The full integration of the smart gas sensor with automatically temperature-reading ICs demonstrates the lowest power consumption of 57 mW at 300 °C and fast thermal response of 10 ms. © 2008 IOP Publishing Ltd.

Grid-refined LES predictions for Fan-OGV broadband noise

This work forms part of a project on the use of large eddy simulation (LES) for broadband rotor-stator interaction noise prediction. In this paper, we focus on LES calculations of noise sources on and close to a blade trailing edge. We consider two test cases; one an isolated NACA0012 airfoil in flow, and the other an industry-standard rotating fan. In the first case, turbulent mean and RMS velocities and energy spectra at different locations are compared with those from experiment. 1,2The sound generated by the unsteady pressure fluctuations on the airfoil surface and by the flow turbulence will be predicted using a Ffowcs Williams Hawkings (FW-H) surface. In the second case, unsteady flow and acoustic fields around the blade passage 3 are presented for a refined mesh, and the rotor-stator tonal noise will be predicted by using the rotor-wake mean velocity profile and the methodology described in Lloyd & Peake 4. Copyright © 2009 by Qinling Li, Nigel Peake & Mark Savill.