Characterisation of technology roadmaps: Purpose and format

A report on characterisation of technology roadmaps, its purpose and formats are presented. A fast-start process is developed to support the initiation of technology roadmapping in firms to address the industrial needs. The purpose of each roadmap is related to a number of planning aims: product, capability, integration, strategic, long-range, programme and process planning. The second set of categories are related to the format of the roadmap, based on observed structure: multiple or single layers, bars, tables, graphs, pictorial forms, flow diagrams and text. It is concluded that technology roadmaps processes a great potential for supporting the development and implementation of business product and technology strategy.

Methods for enhanced electrical transduction and characterization of micromechanical resonators

This paper details the design and enhanced electrical transduction of a bulk acoustic mode resonator fabricated in a commercial foundry MEMS process utilizing 2.5 μm gaps. The I-V characteristics of electrically addressed silicon resonators are often dominated by capacitive parasitics, inherent to hybrid technologies. This paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air via analytical models accompanied by measurements of fabricated devices with the primary aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages. In view of ultimately enhancing the motional to feedthrough current ratio, a new detection technique that combines second harmonic capacitive actuation and piezoresistive detection is presented herein. This new method is shown to outperform previously reported methods utilizing voltages as low as ±3 V in air, providing a promising solution for low voltage CMOS-MEMS integration. To elucidate the basis of this improvement in signal output from measured devices, an approximate analytical model for piezoresistive sensing specific to the resonator topology reported here is also developed and presented. © 2010 Elsevier B.V. All rights reserved.