High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining

This paper reports the fabrication and electrical characterization of high tuning range AlSi RF MEMS capacitors. We present experimental results obtained by a surface micromachining process that uses dry etching of sacrificial amorphous silicon to release Al-1%Si membranes and has a low thermal budget (<450 °C) being compatible with CMOS post-processing. The proposed silicon sacrificial layer dry etching (SSLDE) process is able to provide very high Si etch rates (3-15 μm/min, depending on process parameters) with high Si: SiO2 selectivity (>10,000:1). Single- and double-air-gap MEMS capacitors, as well as some dedicated test structures needed to calibrate the electro-mechanical parameters and explore the reliability of the proposed technology, have been fabricated with the new process. S-parameter measurements from 100 MHz up to 2 GHz have shown a capacitance tuning range higher than 100% with the double-air-gap architecture. The tuning range can be enlarged with a proper DC electrical bias of the capacitor electrodes. Finally, the reported results make the proposed MEMS tuneable capacitor a good candidate for above-IC integration in communications applications. © 2004 Elsevier B.V. All rights reserved.

Using internal fibre geometry to improve the performance of pin-loaded holes in composite materials

The anisotropic nature of fibre reinforced composites leads to large stress concentrations around pin-loaded holes through standard weave cloths. Proper understanding of how this anisotropic nature affects the load distribution around holes can be utilised to reduce these con-centrations if sufficient thought is given to the internal fibre geometry near to the hole. Such local reinforcements need not be highly complex and can be readily produced without excessive effort, producing significant improvements in performance. © 1996 Kluwer Academic Publishers.

Analytically-based approach to rotor-stator interaction noise in mean swirling flow

A method for modelling and predicting the noise generated by the interaction between the unsteady wake shed from the rotor and a downstream row of stators in a modern ultra-high bypass ducted turbofan engine is described. An analytically-based model is developed to account for three main features of the problem. First, the way in which a typical unsteady wake disturbance from the rotor interacts and is distorted by the mean swirling flow as it propagates downstream. The analysis allows for the inclusion of mean entropy gradients and entropy perturbations. Second, the effects of real stator-blade geometry and proper representation of the genuinely three-dimensional nature of the problem. Third, to model the propagation of the resulting noise back upstream in mean swirling flow. The analytical nature of the problem allows for the inclusion of all wake harmonics and enables the response at all blade passing frequencies to be determined. Example results are presented for an initial wake distribution corresponding to a genuine rotor configuration. Comparisons between numerical data and the asymptotic model for the wake evolution are made. Copyright © 2004 by the American Institute of Aeronautics and Astronautics, Inc. All rights reserved.