Design and testing of an ortho-planar micro-valve

This paper presents the production and testing of an ortho-planar one-way micro-valve. The main advantages of such valves are that they are very compact and can be made from a single flat piece of material. A previous paper presents and discusses a micro-valve assembly based on a spider spring. The present paper focuses on the valve assembly process and the valve performance.. Several prototypes with a bore of 0.2 mm have been built using two manufacturing techniques (μEDM and stereo-lithography) and tested for pressures up to 7 bars. © 2008 International Federation for Information Processing.

Modelling and characterisation of an ortho-planar micro-valve

The main difficulties encountered in the development of microscale fluidic pumping systems stem from the fact that these systems tend to comprise highly three-dimensional parts, which are incompatible with traditional microproduction technologies. Regardless of the type of pumping principle, most of the hydraulic systems contain valves and in particular a one-way valve. This paper presents the design and modelling of an ortho-planar one-way microvalve. The main advantages of such a valve are that it is very compact and can be made from a single flat piece of material. An analytical model of the spring deflection has been developed and compared to FEM. A prototype with a bore of 1.5 mm has been build using a micro EDM (electro discharge machining) machine and also tested. © 2006 International Federation for Information Processing.