Nitrogen incorporation into tetrahedral hydrogenated amorphous carbon

Structural changes induced by the incorporation of nitrogen into ta-C : H films have been studied by Electron Energy Loss Spectroscopy, X-Ray Photoelectron Spectroscopy, Fourier Transformed Infrared Spectroscopy and Ultraviolet-Visible Spectroscopy. ta-C:H films have been synthesised using a low pressure Electron Cyclotron Wave Resonance (ECWR) source which provides a plasma beam with a high degree of ionisation and dissociation. Nitrogen was incorporated by adding N2 to the C2H2 plasma used for the deposition of ta-C : H films. The N/C atomic ratio in the films rises rapidly until the N2/C2H2 gas ratio reaches three, and then increases more gradually, while the deposition rate decreases steeply. Chemical sputtering of the forming films and the formation of molecular nitrogen within the films limit the maximum nitrogen content to about N/C = 0.6. For low nitrogen content the films retain their diamond-like properties, however as N/C atomic ratio increases, a polymeric-like material is formed, with >C=N- structures and terminating C=N and NH groups that decrease the connectivity of the network.

Centrifuge modelling and dynamic testing of municipal solid waste (MSW) landfills

An investigation into the seismic behaviour of municipal solid waste (MSW) landfills by dynamic centrifuge testing was undertaken. This paper presents physical modelling of MSW landfills for dynamic centrifuge testing, with regard to the following research areas: 1. amplification characteristics of municipal solid waste; 2. tension induced in geomembranes placed on landfill slopes due to earthquake loading; 3. damage to landfill liners due to liquefaction of foundation soil. A model waste, that has engineering properties similar to MSW, is presented. A model geomembrane that can be used in centrifuge tests is also presented. Results of dynamic centrifuge tests with the model geomembrane showed that an earthquake loading induces additional permanent tension (∼25%) in the geomembrane. © 2006 Taylor & Francis Group.

Centrifuge modelling and dynamic testing of municipal solid waste (MSW) landfills

An investigation into the seismic behaviour of municipal solidwaste (MSW) landfills by dynamic centrifuge testing was undertaken. This paper presents physical modelling of MSW landfills for dynamic centrifuge testing, with regard to the following research areas: 1. amplification characteristics of municipal solid waste; 2. tension induced in geomembranes placed on landfill slopes due to earthquake loading; 3. damage to landfill liners due to liquefaction of foundation soil. A model waste, that has engineering properties similar to MSW, is presented. A model geomembrane that can be used in centrifuge tests is also presented. Results of dynamic centrifuge tests with the model geomembrane showed that an earthquake loading induces additional permanent tension (∼25%) in the geomembrane. © 2006 Taylor & Francis Group, London.

Fluorine redistribution and incorporation during solid phase epitaxy of preamorphized Si

The redistribution of fluorine during solid phase epitaxial regrowth (SPER) of preamorphized Si has been experimentally investigated, explained, and simulated, for different F concentrations and temperatures. We demonstrate, by a detailed analysis and modeling of F secondary ion mass spectrometry chemical-concentration profiles, that F segregates in amorphous Si during SPER by splitting in three possible states: (i) a diffusive one that migrates in amorphous Si; (ii) an interface segregated state evidenced by the presence of a F accumulation peak at the amorphous-crystal interface; (iii) a clustered F state. The interplay among these states and their roles in the F incorporation into crystalline Si are fully described. It is shown that diffusive F migrates by a trap limited diffusion mechanism and also interacts with the advancing interface by a sticking-release dynamics that regulates the amount of F segregated at the interface. We demonstrate that this last quantity determines the regrowth rate through an exponential law. On the other hand we show that neither the diffusive F nor the one segregated at the interface can directly incorporate into the crystal but F has to cluster in the amorphous phase before being incorporated in the crystal, in agreement with recent experimental observations. The trends of the model parameters as a function of the temperature are shown and discussed obtaining a clear energetic scheme of the F redistribution and incorporation in preamorphized Si. The above physical understanding and the model could have a strong impact on the use of F as a tool for optimizing the doping profiles in the fabrication of ultrashallow junctions. © 2010 The American Physical Society.