Zinc oxide nanowire based hydrogen sensor on SOI CMOS platform

Here we report on the successful low-temperature growth of zinc oxide nanowires (ZnONWs) on silicon-on-insulator (SOI) CMOS micro-hotplates and their response, at different operating temperatures, to hydrogen in air. The SOI micro-hotplates were fabricated in a commercial CMOS foundry followed by a deep reactive ion etch (DRIE) in a MEMS foundry to form ultra-low power membranes. The micro-hotplates comprise p+ silicon micro-heaters and interdigitated metal electrodes (measuring the change in resistance of the gas sensitive nanomaterial). The ZnONWs were grown as a post-CMOS process onto the hotplates using a CMOS friendly hydrothermal method. The ZnONWs showed a good response to 500 to 5000 ppm of hydrogen in air. We believe that the integration of ZnONWs with a MEMS platform results in a low power, low cost, hydrogen sensor that would be suitable for handheld battery-operated gas sensors. © 2011 Published by Elsevier Ltd.

Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device

This paper reports on a switchable multi-band filter response achieved within a single micro-electro-mechanical device. A prototype device fabricated in a SOI process demonstrates a voltage programmable and tunable, dual-band, band-pass/band-stop response. Both analytical and finite element models are introduced in this paper to elucidate the operating principle of the filter and to guide filter design. Voltage programmability of the filter characteristic is demonstrated with the ability to independently tune the centre frequency and bandwidth for each band. A representative measurement shows that the minimum 3 dB-bandwidth (BW) is 155 Hz, 140Hz, and 20 dB-BW is 216 Hz, 203Hz for the upper-band and lower-band center frequencies located at 131.5 kHz and 130.7 kHz, respectively. © 2011 IEEE.

Mechanical response of carbon fiber composite sandwich panels with pyramidal truss cores

The combination of light carbon fiber reinforced polymer (CFRP) composite materials with structurally efficient sandwich panel designs offers novel opportunities for ultralight structures. Here, pyramidal truss sandwich cores with relative densities ρ̄ in the range 1-10% have been manufactured from carbon fiber reinforced polymer laminates by employing a snap-fitting method. The measured quasi-static shear strength varied between 0.8 and 7.5 MPa. Two failure modes were observed: (i) Euler buckling of the struts and (ii) delamination failure of the laminates. Micro-buckling failure of the struts was not observed in the experiments reported here while Euler buckling and delamination failures occurred for the low (ρ̄≤1%) and high (ρ̄>1%) relative density cores, respectively. Analytical models for the collapse of the composite cores by these failure modes are presented. Good agreement between the measurements and predictions based on the Euler buckling and delamination failure of the struts is observed while the micro-buckling analysis over-predicts the measurements. The CFRP pyramidal cores investigated here have a similar mechanical performance to CFRP honeycombs. Thus, for a range of multi-functional applications that require an "open-celled" architecture (e.g. so that cooling fluid can pass through a sandwich core), the CFRP pyramidal cores offer an attractive alternative to honeycombs. © 2012 Elsevier Ltd. All rights reserved.

Micro-architectured solids: From blast resistant structures to morphing wings

Classes of lattice material are reviewed, and their fracture response is explored in the context of the core of a sandwich panel. Attention is focussed on the strength of a sandwich plate with centre-cracked core made from an elastic-brittle square lattice. Predictions are summarised for the un-notched strength of the sandwiched core and for the fracture toughness of the lattice under remote tension, remote compression or remote shear. It is assumed that the lattice fails when the local stress in the cell walls attains the tensile or compressive strength of the solid, or when local buckling occurs. The local failure mechanism that dictates the unnotched strength may be different from that dictating the fracture toughness. Fracture mechanism maps are generated in order to reveal the dominant local failure mechanism for any given cell wall material.

Thermo-optical characterization of fluorescent rhodamine B based temperature-sensitive nanosensors using a CMOS MEMS micro-hotplate

A custom designed microelectromechanical systems (MEMS) micro-hotplate, capable of operating at high temperatures (up to 700 C), was used to thermo-optically characterize fluorescent temperature-sensitive nanosensors. The nanosensors, 550 nm in diameter, are composed of temperature-sensitive rhodamine B (RhB) fluorophore which was conjugated to an inert silica sol-gel matrix. Temperature-sensitive nanosensors were dispersed and dried across the surface of the MEMS micro-hotplate, which was mounted in the slide holder of a fluorescence confocal microscope. Through electrical control of the MEMS micro-hotplate, temperature induced changes in fluorescence intensity of the nanosensors was measured over a wide temperature range. The fluorescence response of all nanosensors dispersed across the surface of the MEMS device was found to decrease in an exponential manner by 94%, when the temperature was increased from 25 C to 145 C. The fluorescence response of all dispersed nanosensors across the whole surface of the MEMS device and individual nanosensors, using line profile analysis, were not statistically different (p < 0.05). The MEMS device used for this study could prove to be a reliable, low cost, low power and high temperature micro-hotplate for the thermo-optical characterisation of sub-micron sized particles. The temperature-sensitive nanosensors could find potential application in the measurement of temperature in biological and micro-electrical systems. The Authors. © 2013 Published by Elsevier B.V. All rights reserved.

Micro-electro-mechanical resonant tilt sensor with 250 nano-radian resolution

This paper reports a high-resolution frequency-output MEMS tilt sensor based on resonant sensing principles. The tilt sensor measures orientation by sensing the component of gravitational acceleration along a specified input axis. A combination of design enhancements enables significantly higher sensitivity for this device as compared to previously reported prototype sensors. The MEMS tilt sensor is calibrated on a manual tilt table over tilt angles ranging over 0-90 degrees with a relatively linear response measured in the range of ±20°(linearity error <2.3%) with a scale factor of approximately 50.06 Hz/degree. The noise-limited resolution of the sensor is found to be approximately 250 nano-radians for an integration time of 0.8 s, which is over an order of magnitude better than previously reported results [1]. © 2013 IEEE.