Biblioteca Digital

28 resultados para DBD lamp

em Cambridge University Engineering Department Publications Database

Thermal and stress modeling for the flash lamp crystallization of amorphous silicon films

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Thermally induced deformation and stresses during millisecond flash lamp annealing

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A comparative study of the photo-CVD of a-Si:H from internal and external lamp systems

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Photoenhanced deposition of silicon oxide thin films using an internal nitrogen discharge lamp

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Photo-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbon using an internal discharge lamp

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Primary reaction processes in the deposition of diamond-like carbon films by photon-enhanced CVD of methane using a windowless hydrogen lamp

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Deposition of diamond-like carbon films by photon-enhanced chemical vapour deposition of methane using a windowless hydrogen lamp

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Posthydrogenation of low-pressure chemical-vapor-deposited amorphous silicon using a novel internal lamp system and its application to thin-film transistor fabrication

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Photoenhanced CVD of hydrogenated amorphous silicon using an internal hydrogen discharge lamp

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Direct UV photoenhanced chemical vapour deposition of a-Si:H from disilane using a deuterium lamp

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Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp

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Flash-lamp annealing of semiconductor materials - Applications and process models

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Process control and melt depth homogenization for SiC-on-Si structures during flash lamp annealing by carbon implantation

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Modeling and regrowth mechanisms of flash lamp processing of SiC-on-silicon heterostructures

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Homogenization of the melting depth in SiC on Si structures during flash lamp irradiation

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