5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million

This paper reports the design and electrical characterization of a micromechanical disk resonator fabricated in single crystal silicon using a foundry SOI micromachining process. The microresonator has been selectively excited in the radial extensional and the wine glass modes by reversing the polarity of the DC bias voltage applied on selected drive electrodes around the resonant structure. The quality factor of the resonator vibrating in the radial contour mode was 8000 at a resonant frequency of 6.34 MHz at pressure below 10 mTorr vacuum. The highest measured quality factor of the resonator in the wine glass resonant mode was 1.9 × 106 using a DC bias voltage of 20 V at about the same pressure in vacuum; the resonant frequency was 5.43 MHz and the lowest motional resistance measured was approximately 17 kΩ using a DC bias voltage of 60 V applied across 2.7 μm actuation gaps. This corresponds to a resonant frequency-quality factor (f-Q) product of 1.02 × 1013, among the highest reported for single crystal silicon microresonators, and on par with the best quartz crystal resonators. The quality factor for the wine glass mode in air was approximately 10,000. © 2009 Elsevier B.V. All rights reserved.

Analytical approximations for the modal acoustic impedances of simply supported, rectangular plates.

Coupling of the in vacuo modes of a fluid-loaded, vibrating structure by the resulting acoustic field, while known to be negligible for sufficiently light fluids, is still only partially understood. A particularly useful structural geometry for the study of this problem is the simply supported, rectangular flat plate, since it exhibits all the relevant physical features while still admitting an analytical description of the modes. Here the influence of the fluid can be expressed in terms of a set of doubly infinite integrals over wave number: the modal acoustic impedances. Closed-form solutions for these impedances do not exist and, while their numerical evaluation is possible, it greatly increases the computational cost of solving the coupled system of modal equations. There is thus a need for accurate analytical approximations. In this work, such approximations are sought in the limit where the modal wavelength is small in comparison with the acoustic wavelength and the plate dimensions. It is shown that contour integration techniques can be used to derive analytical formulas for this regime and that these formulas agree closely with the results of numerical evaluations. Previous approximations [Davies, J. Sound Vib. 15(1), 107-126 (1971)] are assessed in the light of the new results and are shown to give a satisfactory description of real impedance components, but (in general) erroneous expressions for imaginary parts.

Short-channel polymer field-effect-transistor fabrication using spin-coating-induced edge template and ink-jet printing

A method to fabricate polymer field-effect transistors with submicron channel lengths is described. A thin polymer film is spin coated on a prepatterned resist with a low resolution to create a thickness contrast in the overcoated polymer layer. After plasma and solvent etching, a submicron-sized line structure, which templates the contour of the prepattern, is obtained. A further lift-off process is applied to define source-drain electrodes of transistors. With a combination of ink-jet printing, transistors with channel length down to 400 nm have been fabricated by this method. We show that drive current density increases as expected, while the on/off current ratio 106 is achieved. © 2005 American Institute of Physics.

Three-dimensional SBLI control for transonic airfoils

The application of shock control to transonic airfoils and wings has been demonstrated widely to have the potential to reduce wave drag. Most of the suggested control devices are two-dimensional, that is they are of uniform geometry in spanwise direction. Examples of such techniques include contour bumps and passive control. Recently it has been observed that a spanwise array of discrete three-dimensional controls can have similar benefits but also offer advantages in terms of installation complexity and drag. This paper describes research carried out in Cambridge into various three-dimensional devices, such as slots, grooves and bumps. In all cases the control device is applied to the interaction of a normal shock wave (M=1.3) with a turbulent boundary layer. Theoretical considerations are proposed to determine how such fundamental experiments can provide estimates of control performance on a transonic wing. The potential of each class of three-dimensional device for wave drag reduction on airfoils is discussed and surface bumps in particular are identified as offering potential drag savings for typical transonic wing applications under cruise conditions.

Investigation of extinction in unsteady flames in turbulent combustion by 2D-LIF of OH radials and flamelet analysis

An experimental and theoretical investigation of premixed turbulent combustion in an engine simulator is presented. The distribution of hydroxyl radicals formed in the combustion of propane/air mixtures was visualized by 2D-LIF and used to monitor the progress of the combustion process. For stoichiometric mixtures, images showed a continuous wrinkled flame front, while in lean (λ=1.5) mixtures, local flame extinction was observed as discontinuities in the reaction zone. A bright active reaction zone was still observed in flame inlets and closed concave structures. The effects of self-absorption and of collisional quenching on the fluorescence signal are considered and appear to have only a minor net influence on the shape and width of the flame front. The images are evaluated and interpreted in terms of the Lewis number effect and the laminar flamelet model. Analysis was performed by determining the contour lines of the images (specifically, the ratios of average maximum to equilibrium OH concentration) and comparing with corresponding ratios from unstrained flame simulations. The results show that although the degree of turbulence is not high enough for straining effects to be important, flamelet curvature does play a significant role in the combustion of lean mixtures; this is manifested by a mean effective flame velocity that is less than the laminar burning velocity. © 1991 Combustion Institute.