Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors

Zinc oxide (ZnO) thin films were deposited at high rates ( > 50 nm min-1) using a unique technique known as high target utilisation sputtering (HiTUS). The films obtained possess good crystallographic orientation, low surface roughness, very low stress and excellent piezoelectric properties. We have utilised the films to develop highly sensitive biosensors based on thickness longitudinal mode (TLM) thin film bulk acoustic resonators (FBARs). The FBARs have the fundamental TLM at a frequency near 1.5 GHz and quality factor Q higher than 1,000, which is one of the largest values ever reported for ZnO-based FBARs. Bovine Serum Albumin (BSA) solutions with different concentrations were placed on the top of different sets of identical FBARs and their responses to mass-loading from physically adsorbed protein coatings were investigated. These resonators demonstrated a high sensitivity and thus have a great potential as gravimetric sensors for biomedical applications. © 2011 Inderscience Enterprises Ltd.

Face-based Selection of Corners in 3D Substructuring

In most recent substructuring methods, a fundamental role is played by the coarse space. For some of these methods (e.g. BDDC and FETI-DP), its definition relies on a 'minimal' set of coarse nodes (sometimes called corners) which assures invertibility of local subdomain problems and also of the global coarse problem. This basic set is typically enhanced by enforcing continuity of functions at some generalized degrees of freedom, such as average values on edges or faces of subdomains. We revisit existing algorithms for selection of corners. The main contribution of this paper consists of proposing a new heuristic algorithm for this purpose. Considering faces as the basic building blocks of the interface, inherent parallelism, and better robustness with respect to disconnected subdomains are among features of the new technique. The advantages of the presented algorithm in comparison to some earlier approaches are demonstrated on three engineering problems of structural analysis solved by the BDDC method.

Film bulk acoustic resonator nanosensors for multi-task sensing

This paper shows that film bulk acoustic resonator (FBAR) arrays can be very useful sensors either to detect physical parameters such as temperature and pressure directly or to detect bio-chemicals with extremely high sensitivities by incorporating a chemisorption layer or bio-probe molecules. Furthermore, it also shows that surface acoustic wave devices can be integrated with a FBAR sensor array on the same piezoelectric substrate as the microfluidics systems to perform transportation and mixing of biosamples etc. demonstrating the possibility to fabricate integrated lab-on-a-chip detection systems, in which all the actuators and sensors are operated by acoustic wave devices. This makes the detection system simple, low cost and easy to operate and hence has great commercial potential. © 2011 Inderscience Enterprises Ltd.