Numerical study of the impact of process variations on the motional resistance of weakly coupled MEMS resonators

This paper presents a numerical study of the impact of process-induced variations on the achievable motional resistance Rx of one-dimensional, cyclic and cross-coupled architectures of electrostatically transduced MEMS resonators operating in the 250 kHz range. Monte Carlo numerical simulations which accounted for up to 0.75% variation in critical resonator feature sizes were initiated on 1, 2, 3, 4, 5 and 9 coupled MEMS resonators for three distinct coupling architectures. Improvements of 100X in the spread of Rx and 2.7X in mean achievable Rx are reported for the case of 9 resonators when implemented in the cross-coupled topology, as opposed to the traditional one-dimensional chain. © 2013 IEEE.

A Grassman-Rayleigh quotient iteration for computing invariant subspaces

The classical Rayleigh Quotient Iteration (RQI) computes a 1-dimensional invariant subspace of a symmetric matrix A with cubic convergence. We propose a generalization of the RQI which computes a p-dimensional invariant subspace of A. The geometry of the algorithm on the Grassmann manifold Gr(p,n) is developed to show cubic convergence and to draw connections with recently proposed Newton algorithms on Riemannian manifolds.