Development of all metal electrothermal actuator and its applications

The in-plane motion of microelectrothermal actuator ("heatuator") has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ∼60% larger than that of a Si-based actuator under the same power consumption. Metals are much better for thermal actuators as they provide a relatively large deflection and large force, for a low operating temperature and power consumption. Electroplated Ni films were used to fabricate heatuators. The electrical and mechanical properties of electroplated Ni thin films have been investigated as a function of temperature and plating current density, and the process conditions have been optimized to obtain stress-free films suitable for microelectromechanical systems applications. Lateral thermal actuators have been successfully fabricated, and electrically tested. Microswitches and microtweezers utilizing the heatuator have also been fabricated and tested. © 2005 Society of Photo-Optical Instrumentation Engineers.

First demonstration on the non-transparency of FWM and its application of 40 Gbit/s all-optical CSRZ-to-RZ format conversion

We report first experimental demonstration on the non-transparent characteristic of FWM using NRZ-DPSK, RZ-DPSK, CSRZ-DPSK, and CSRZ signals. One potential non-transparency application of 40Gbit/s CSRZ-to-RZ format conversion is experimentally demonstrated. © 2008 IEEE.