Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material

We have fabricated an ultra-compact 4×4 optical matrix on InP/InGaAsP material. 1×4 MMI couplers and TIR mirrors are employed to produce a compact 1×2 mm2 device. A CH4/H2/O2 RIE dry etch process has been used to realize two-level dry etching: deep-etch for both the MMI couplers and the mirrors and shallow-etch for the rest of the routing waveguides. It was found that a metal/dielectric bilayer mask is essential for multi-dry-etch processes and high profile verticality. We have found a Ti intermediate mask for the deep-etch process which is removable by SF6 dry-etch before the following shallow process. Dry-etch removal of the intermediate mask is necessary to protect the deep-etched mirror sidewall.

Friction and material transfer in micro-scale sliding contact between aluminium alloy and steel

A ball-on-flat reciprocating micro-tribometer has been used to measure the friction coefficient between aluminium alloy strip and a steel ball. A relatively small ball and correspondingly low contact load is used to give a contact width of the order of 100μm, closer to asperity contact widths than generally found for this type of test. The effects of load, initial strip surface roughness, lubricants and boundary additives are investigated. It is found that the friction coefficient is significantly reduced by the addition of a lubricant. Observations of the wear tracks and ball surface show that the material transfer from aluminium to the ball is reduced in the presence of the lubricant. The initial friction coefficient is further reduced by the addition of a boundary additive, but the friction coefficient after 8 cycles is unchanged. Copyright © 2004 by Springer Science+Business Media, Inc.

Durability study of eleven years old cement-bentonite cut-off wall material

Comprehensive understanding of the long-term performance of cement-bentonite slurry trench cut-off walls is essential as these mixes may degrade when exposed to aggressive environments or when subjected to prolonged drying. A series of wetting-drying and immersion experiments was carried out to evaluate the durability characteristics of laboratory mixed samples and block field samples from 40 days to 11 years of age. For the wetting-drying tests, the samples buried in medium graded sand were subjected to periodical flooding and drying cycles. They were then used for permeability testing and unconfined compressive strength (UCS) testing. For the immersion tests, the samples confined in perforated molds were submerged in magnesium sulfate solution for 16 weeks and their microstructures were then analyzed using X-ray diffraction (XRD) technique. This paper identifies the effects of contaminant exposure on durability of cement-bentonite and the effects of aging by comparing 11 years old samples to younger samples. Test results showed that young or previously contaminated cement-bentonite mixes are more susceptible to sulfate attack than old or less contaminated mixes. Copyright ASCE 2008.