Advances in nanodevices and nanofabrication: Selected publications from symposium of nanodevices and nanofabrication in ICMAT2011

A variety of devices at nanometer scale / molecular scale for electronic, photonics, optoelectronics, biological and mechanical applications have been created through a rapid development of materials and fabrication technology. Further development of nanodevices strongly depends on the state-of-the-art knowledge of science and technology at the sub-100nm length scale. This symposium proceedings serves as a nice platform on which scientists and engineers can present and highlight some of the key advances in the following topics: Electronic and optoelectronic devices of nanometer scale / molecular scale. Nanomechanics and NEMS. Electromechanical coupled devices. Manipulation and aligning processes at nanometer scale / molecular scale. Quantum phenomena. Modeling of nanodevices and nanostructures. Fabrication and property characterization of nanodevices. Nanofabrication with focused beam technology, e.g., focused ion beam, laser and proton beam. © 2012 by Pan Stanford Publishing Pte. Ltd. All rights reserved.

Label-free detection of human prostate-specific antigen (hPSA) using film bulk acoustic resonators (FBARs)

Label-free detection of cancer biomarkers using low cost biosensors has promising applications in clinical diagnostics. In this work, ZnO-based thin film bulk acoustic wave resonators (FBARs) with resonant frequency of ∼1.5 GHz and mass sensitivity of 0.015 mg/m2 (1.5 ng/cm2) have been fabricated for their deployment as biosensors. Mouse monoclonal antibody, anti-human prostate-specific antigen (Anti-hPSA) has been used to bind human prostate-specific antigen (hPSA), a model cancer used in this study. Ellipsometry was used to characterize and optimise the antibody adsorption and antigen binding on gold surface. It was found that the best amount of antibody at the gold surface for effective antigen binding is around 1 mg/m2, above or below which resulted in the reduced antigen binding due to either the limited binding sites (below 1 mg/m2) or increased steric effect (above 1 mg/m2). The FBAR data were in good agreement with the data obtained from ellipsometry. Antigen binding experiments using FBAR sensors demonstrated that FBARs have the capability to precisely detect antigen binding, thereby making FBARs an attractive low cost alternative to existing cancer diagnostic sensors. © 2013 Elsevier B.V.

Design and formulation of functional pluripotent stem cell-derived cardiac microtissues.

Access to robust and information-rich human cardiac tissue models would accelerate drug-based strategies for treating heart disease. Despite significant effort, the generation of high-fidelity adult-like human cardiac tissue analogs remains challenging. We used computational modeling of tissue contraction and assembly mechanics in conjunction with microfabricated constraints to guide the design of aligned and functional 3D human pluripotent stem cell (hPSC)-derived cardiac microtissues that we term cardiac microwires (CMWs). Miniaturization of the platform circumvented the need for tissue vascularization and enabled higher-throughput image-based analysis of CMW drug responsiveness. CMW tissue properties could be tuned using electromechanical stimuli and cell composition. Specifically, controlling self-assembly of 3D tissues in aligned collagen, and pacing with point stimulation electrodes, were found to promote cardiac maturation-associated gene expression and in vivo-like electrical signal propagation. Furthermore, screening a range of hPSC-derived cardiac cell ratios identified that 75% NKX2 Homeobox 5 (NKX2-5)+ cardiomyocytes and 25% Cluster of Differentiation 90 OR (CD90)+ nonmyocytes optimized tissue remodeling dynamics and yielded enhanced structural and functional properties. Finally, we demonstrate the utility of the optimized platform in a tachycardic model of arrhythmogenesis, an aspect of cardiac electrophysiology not previously recapitulated in 3D in vitro hPSC-derived cardiac microtissue models. The design criteria identified with our CMW platform should accelerate the development of predictive in vitro assays of human heart tissue function.

Thermo-optical characterization of fluorescent rhodamine B based temperature-sensitive nanosensors using a CMOS MEMS micro-hotplate

A custom designed microelectromechanical systems (MEMS) micro-hotplate, capable of operating at high temperatures (up to 700 C), was used to thermo-optically characterize fluorescent temperature-sensitive nanosensors. The nanosensors, 550 nm in diameter, are composed of temperature-sensitive rhodamine B (RhB) fluorophore which was conjugated to an inert silica sol-gel matrix. Temperature-sensitive nanosensors were dispersed and dried across the surface of the MEMS micro-hotplate, which was mounted in the slide holder of a fluorescence confocal microscope. Through electrical control of the MEMS micro-hotplate, temperature induced changes in fluorescence intensity of the nanosensors was measured over a wide temperature range. The fluorescence response of all nanosensors dispersed across the surface of the MEMS device was found to decrease in an exponential manner by 94%, when the temperature was increased from 25 C to 145 C. The fluorescence response of all dispersed nanosensors across the whole surface of the MEMS device and individual nanosensors, using line profile analysis, were not statistically different (p < 0.05). The MEMS device used for this study could prove to be a reliable, low cost, low power and high temperature micro-hotplate for the thermo-optical characterisation of sub-micron sized particles. The temperature-sensitive nanosensors could find potential application in the measurement of temperature in biological and micro-electrical systems. The Authors. © 2013 Published by Elsevier B.V. All rights reserved.

Implementation of trailer steering control on a multi-unit vehicle at high speeds

A high-speed path-following controller for long combination vehicles (LCVs) was designed and implemented on a test vehicle consisting of a rigid truck towing a dolly and a semitrailer. The vehicle was driven through a 3.5 m wide lane change maneuver at 80 km/h. The axles of the dolly and trailer were steered actively by electrically-controlled hydraulic actuators. Substantial performance benefits were recorded compared with the unsteered vehicle. For the best controller weightings, performance improvements relative to unsteered case were: lateral tracking error 75% reduction, rearward amplification (RA) of lateral acceleration 18% reduction, and RA of yaw rate 37% reduction. This represents a substantial improvement in stability margins. The system was found to work well in conjunction with the braking-based stability control system of the towing vehicle with no negative interaction effects being observed. In all cases, the stability control system and the steering system improved the yaw stability of the combination. © 2014 by ASME.

Silicon on insulator thermodiode with extremely wide working temperature range

This paper presents for the first time the performance of a silicon-on-insulator (SOI) p-n thermodiode, which can operate in an extremely wide temperature range of 200°C to 700°C while maintaining its linearity. The thermodiode is embedded in a thin dielectric membrane underneath a tungsten microheater, which allows the diode characterization at very high temperature (> 800°C). The effect of the junction area (Aj) on the thermodiode linearity, sensitivity and self-heating is experimentally and theoretically investigated. Results on the long-term diode stability at high temperature are also reported. © 2013 IEEE.

Graphene SOI CMOS sensors for detection of PPB levels of NO2 in air

There is considerable demand for sensors that are capable of detecting ultra-low concentrations (sub-PPM) of toxic gases in air. Of particular interest are NO2 and CO that are exhaust products of internal combustion engines. Electrochemical (EC) sensors are widely used to detect these gases and offer the advantages of low power, good selectivity and temporal stability. However, EC sensors are large (1 cm3), hand-made and thus expensive ($25). Consequently, they are unsuitable for the low-cost automotive market that demands units for less than $10. One alternative technology is SnO2 or WO3 resistive gas sensors that are fabricated in volume today using screen-printed films on alumina substrates and operate at 400°C. Unfortunately, they suffer from several disadvantages: power consumption is high 200 mW; reproducibility of the sensing element is poor; and cross-sensitivity is high. © 2013 IEEE.

Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance

This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its one-dimensional counterpart. © 2013 IEEE.

Directly and parametrically excited bi-stable vibration energy harvester for broadband operation

Despite many recent advances, the wide-spread adoption of vibrational energy harvesting has been limited by the low levels of generated output power and confined operational frequency band. Recent work by the authors on parametrically excited harvesters has demonstrated over an order of magnitude power improvement. This paper presents an investigation into the simultaneous employment of both direct and parametric resonance, as well as the incorporation of bi-stability, in an attempt to further improve the mechanical-to-electrical energy conversion efficiency by broadening the output power spectrum. Multiple direct and parametric resonant peaks from a multi-degree-of-freedom system were observed and an accumulative ∼10 Hz half-power bandwidth was recorded for the first 40 Hz. Real vibration data was also employed to analysis the rms power response effectiveness of the proposed system. © 2013 IEEE.

Towards the formation of neuro-transistor artificial chemical synapse

Highly sensitive biosensor for detection of acetylcholine (ACh) and competitive acetylcholinesterase (AChE) inhibitor, eserine, is investigated. Peculiar microelectronic configuration of an ion-sensitive field-effect transistor (ISFET) in addition to a right choice of the pH-transducing nanolayers allows recording a response of the enzyme-modified ISFET (EnFET) to a wide range of ACh concentrations. We demonstrate a remarkable improvement of at least three orders of magnitude in dose response to ACh. Described bioelectronic system reveals clear response, when the catalytic activity of the immobilized AChE is inhibited in a reversible manner by eserine, competitive inhibitor of AChE. ©2007 IEEE.

Numerical simulations supporting the process design of ring rolling processes

In conventional Finite Element Analysis (FEA) of radial-axial ring rolling (RAR) the motions of all tools are usually defined prior to simulation in the preprocessing step. However, the real process holds up to 8 degrees of freedom (DOF) that are controlled by industrial control systems according to actual sensor values and preselected control strategies. Since the histories of the motions are unknown before the experiment and are dependent on sensor data, the conventional FEA cannot represent the process before experiment. In order to enable the usage of FEA in the process design stage, this approach integrates the industrially applied control algorithms of the real process including all relevant sensors and actuators into the FE model of ring rolling. Additionally, the process design of a novel process 'the axial profiling', in which a profiled roll is used for rolling axially profiled rings, is supported by FEA. Using this approach suitable control strategies can be tested in virtual environment before processing. © 2013 AIP Publishing LLC.

Fabrication and integration of horizontally aligned carbon nanotube C60 films for UV sensors

Carbon nanotubes (CNTs) are promising for microsystems applications, yet few techniques effectively enable integration of CNTs with precise control of placement and alignment of the CNTs at sufficiently high densities necessary for compelling mechanical or electrical performance. This paper explores new methods for scalable integration of dense, horizontally aligned (HA) CNTs with patterned electrodes. Our technique involves the synthesis of vertically aligned (VA) CNTs directly on a conductive underlayer and subsequent mechanical transformation into HA-CNTs, thus making electrical contact between two electrodes. We compare elasto-capillary folding and mechanical rolling as methods for transforming VA-CNTs, which lead to distinctly different HA-CNT morphologies and potentially impact material and device properties. As an example application of this novel CNT morphology, we investigate fabrication of electrically addressable CNT-C60 hybrid thin films that we previously demonstrated as photodetectors. We synthesize these assemblies by crystallizing C60 from dispersion on HA-CNT thin-film scaffoldings. HA-CNTs fabricated by rolling result in relatively low packing density, so C 60 crystals embed inside the HA-CNT matrix during synthesis. On the other hand, C60 crystallization is restricted to near the surface of HA-CNT films made by the elasto-capillary process. © 2013 IEEE.

Soft robotics: The next generation of intelligent machines

There has been an increasing interest in applying biological principles to the design and control of robots. Unlike industrial robots that are programmed to execute a rather limited number of tasks, the new generation of bio-inspired robots is expected to display a wide range of behaviours in unpredictable environments, as well as to interact safely and smoothly with human co-workers. In this article, we put forward some of the properties that will characterize these new robots: soft materials, flexible and stretchable sensors, modular and efficient actuators, self-organization and distributed control. We introduce a number of design principles; in particular, we try to comprehend the novel design space that now includes soft materials and requires a completely different way of thinking about control. We also introduce a recent case study of developing a complex humanoid robot, discuss the lessons learned and speculate about future challenges and perspectives.

Linear multimodal actuation through discrete coupling

Due to technological limitations, robot actuators are often designed for specific tasks with narrow performance goals, whereas a wide range of behaviors is necessary for autonomous robots in uncertain complex environments. In an effort to increase the versatility of actuators, we introduce a new concept of multimodal actuation (MMA) that employs dynamic coupling in the form of clutches and brakes to change its mode of operation. The dynamic coupling allows motors and passive elements such as springs to be engaged and disengaged within a single actuator. We apply the concept to a linear series elastic actuator which uses friction brakes controlled online for the dynamic coupling. With this prototype, we are able to demonstrate several modes of operation including stiff position control, series elastic actuation as well as the possibility to store and release energy in a controlled manner for explosive tasks such as jumping. In this paper, we model the proposed concept of actuation and show a systematic performance analysis of the physical prototype that we developed in our laboratory. © 1996-2012 IEEE.

Linear multi-modal actuation through discrete coupling

Due to technological limitations robot actuators are often designed for specific tasks with narrow performance goals, whereas a wide range of output and behaviours is necessary for robots to operate autonomously in uncertain complex environments. We present a design framework that employs dynamic couplings in the form of brakes and clutches to increase the performance and diversity of linear actuators. The couplings are used to switch between a diverse range of discrete modes of operation within a single actuator. We also provide a design solution for miniaturized couplings that use dry friction to produce rapid switching and high braking forces. The couplings are designed so that once engaged or disengaged no extra energy is consumed. We apply the design framework and coupling design to a linear series elastic actuator (SEA) and show that this relatively simple implementation increases the performance and adds new behaviours to the standard design. Through a number of performance tests we are able to show rapid switching between a high and a low impedance output mode; that the actuator's spring can be charged to produce short bursts of high output power; and that the actuator has additional passive and rigid modes that consume no power once activated. Robots using actuators from this design framework would see a vast increase in their behavioural diversity and improvements in their performance not yet possible with conventional actuator design. © 2012 IEEE.