Short-channel polymer field-effect-transistor fabrication using spin-coating-induced edge template and ink-jet printing

A method to fabricate polymer field-effect transistors with submicron channel lengths is described. A thin polymer film is spin coated on a prepatterned resist with a low resolution to create a thickness contrast in the overcoated polymer layer. After plasma and solvent etching, a submicron-sized line structure, which templates the contour of the prepattern, is obtained. A further lift-off process is applied to define source-drain electrodes of transistors. With a combination of ink-jet printing, transistors with channel length down to 400 nm have been fabricated by this method. We show that drive current density increases as expected, while the on/off current ratio 106 is achieved. © 2005 American Institute of Physics.

Ink-jet printing for patterning engineering surfaces

This work explored the use of industrial drop-on-demand inkjet printing for masking steel surfaces on engineering components, followed by chemical etching, to produce patterned surfaces. A solvent-based ink was printed on to mild steel samples and the influences of substrate topography and substrate temperature were investigated. Contact angle measurements were used to assess wettability. Regular patterns of circular spots (∼60 /on diameter) and more complex mask patterns were printed. Variation of the substrate temperature had negligible effect on the final size of the printed drops or on the resolution achieved. Colored optical interference fringes were observed on the dried ink deposits and correlated with film thickness measurements by whitelight interferometry.

Thermal characterization of SOI CMOS micro hot-plate gas sensors

This work reports on thermal characterization of SOI (silicon on insulator) CMOS (complementary metal oxide semiconductor) MEMS (micro electro mechanical system) gas sensors using a thermoreflectance (TR) thermography system. The sensors were fabricated in a CMOS foundry and the micro hot-plate structures were created by back-etching the CMOS processed wafers in a MEMS foundry using DRIE (deep reactive ion etch) process. The calibration and experimental details of the thermoreflectance based thermal imaging setup, used for these micro hot-plate gas sensor structures, are presented. Experimentally determined temperature of a micro hot-plate sensor, using TR thermography and built-in silicon resistive temperature sensor, is compared with that estimated using numerical simulations. The results confirm that TR based thermal imaging technique can be used to determine surface temperature of CMOS MEMS devices with a high accuracy. © 2010 EDA Publishing/THERMINIC.

Satellite formation in drop-on-demand printing of polymer solutions

High speed photographic images of jets formed from dilute solutions of polystyrene in diethyl phthalate ejected from a piezoelectric drop-on-demand inkjet head have been analyzed in order to study the formation and distribution of drops as the ligament collapses. Particular attention has been paid to satellite drops, and their relative separation and sizes. The effect of polymer concentration was investigated. The distribution of nearest-neighbour centre spacing between the drops formed from the ligament is better described by a 2-parameter modified gamma distribution than by a Gaussian distribution. There are (at least) two different populations of satellite size relative to the main drop size formed at normal jetting velocities, with ratios of about three between the diameters of the main drop and the successive satellite sizes. The distribution of the differences in drop size between neighbouring drops is close to Gaussian, with a small non-zero mean for low polymer concentrations, which is associated with the conical shape of the ligament prior to its collapse and the formation of satellites. Higher polymer concentrations result in slower jets for the same driving impulse, and also a tendency to form ligaments with a near-constant width. Under these conditions the mean of the distribution of differences in nearest-neighbour drop size was zero.