High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging

This paper reports on the fabrication and characterization of high-resolution strain sensors for steel based on Silicon On Insulator flexural resonators manufactured with chip-level LPCVD vacuum packaging. The sensors present high sensitivity (120 Hz/μ), very high resolution (4 n), low drift, and near-perfect reversibility in bending tests performed in both tensile and compressive strain regimes. © 2013 IEEE.

Compact phase shifter based on highly anisotropic liquid crystals for microwave frequency

A compact microwave phase shifter was designed and fabricated using highly anisotropic liquid crystals (LCs). It comprises a thin LC layer between a ground plane and a directly coupled and inverted microstrip line. The proposed folding configuration is beneficial for size reduction. Both simulation and experimental results confirm the compact size devices with reasonably good performance.