Investigating carbon materials for use as the electron emission source in a parallel electron-beam lithography system

A microelectronic parallel electron-beam lithography system using an array of field emitting microguns is currently being developed. This paper investigates the suitability of various carbon based materials for the electron source in this device, namely tetrahedrally bonded amorphous carbon (ta-C), nanoclustered carbon and carbon nanotubes. Ta-C was most easily integrated into a gated field emitter structure and various methods, such as plasma and heavy ion irradiation, were used to induce emission sites in the ta-C. However, the creation of such emission sites at desired locations appeared to be difficult/random in nature and thus the material was unsuitable for this application. In contrast, nanoclustered carbon material readily field emits with a high site density but the by-products from the deposition process create integration issues when using the material in a microelectronic gated structure. Carbon nanotubes are currently the most promising candidate for use as the emission source. We have developed a high yield and clean (amorphous carbon by-product free) PECVD process to deposit single free standing nanotubes at desired locations with exceptional uniformity in terms of nanotube height and diameter. Field emission from an array of nanotubes was also obtained. © 2001 Elsevier Science B.V.

1.36Tbit/s spectral slicing source based on a Cr4+:YAG femtosecond laser

We report a novel OTDM/WDM source based on spectral slicing of a passively mode-locked Cr4: YAG femtosecond pulse source. Total capacities up to 682Gbit/s and 1.36bit/s with spectral efficiencies of 0.2b/s/Hz and 0.4b/s/Hz have been achieved. © 2003 Optical Society of America.

Extending the transmission distance of a directly modulated laser source using Bragg grating dispersion compensators

Comprehensive computer modelling has been used to investigate the dependence of dispersion penalty on transmission length in an optical communications system employing a directly modulated 2.5Gbit/s DFB laser source and an optimised fibre grating dispersion compensator. Two grating apodization schemes, tanh and Gaussian, have been compared. The 2dB dispersion penalty transmission distance is shown to be approximately 520km along standard monomode fibre after compensation with a 5cm tanh grating. This represents a great improvement over the 150km range expected for a similar uncompensated system.