TECHNIQUES FOR PRODUCING DEFECT-FREE SOI BY DUAL ELECTRON BEAM HEATING OF DEPOSITED POLYSILICON.

Advances in the dual electron-beam recrystallization technique arising from the fast scanning of a line beam parallel to the edges of narrow seeding windows are described. The resultant recrystallized layers are essentially defect-free, have good surface flatness, and cover large areas.

TIME RESOLVED REFLECTIVITY MEASUREMENTS APPLIED TO RAPID ISOTHERMAL ANNEALING OF ION IMPLANTED SILICON.

The annealing of ion implantation damage in silicon by rapid isothermal heating has been monitored by the time resolved reflectivity (TRR) method. This technique was applied simultaneously at a wavelength of 632. 8nm and also at 1152nm, where the optical absorption coefficient of silicon is less. The two wavelength method simplifies the interpretation of TRR results, extends the measurement depth and allows good resolution of the position of the interface between amorphous and crystalline silicon. The regrowth of amorphous layers in silicon, created by self implantation and implanted with electrically active impurities, was observed. Regrowth in rapid isothermal annealing occurs during the heating up stage of typical thermal cycles. Impurities such as B, P, and As increase the regrowth rate in a manner consistent with a vacancy model for regrowth. The maximum regrowth rate in boron implanted silicon is limited by the solid solubility.

INVISCID BLADE-TO-BLADE PREDICTION OF A WAKE-GENERATED UNSTEADY FLOW.

A description is presented of a time-marking calculation of the unsteady flow generated by the interaction of upstream wakes with a moving blade row. The inviscid equations of motion are solved using a finite volume technique. Wake dissipation is modeled using an artificial viscosity. Predictions are presented for the rotor mid-span section of an axial turbine. Reasonable agreement is found between the predicted and measured unsteady blade surface static pressures and velocities. These and other results confirm that simple theories can be used to explain the phenomena of rotor-stator wake interactions.

EXPERIMENTAL TECHNIQUES IN COMBUSTION USE OF IN-CYLINDER IONISATION FOR THE INVESTIGATION AND CONTROL OF SPARK IGNITION ENGINES.

Ions generated during combustion have been used in three ways to give qualitative combustion information. Langmuir type probes have been inserted into the combustion chamber opposite the spark plug location. The centre electrode of the sparking plug itself has been used to produce an ionisation signal from the slightly ionised gases remaining after the flame front has departed. The spark discharge at ignition time has been used as an anemometer.