Advanced thermal processing of semiconductor materials in the msec-range

This paper reviews the advances that flash lamp annealing brings to the processing of the most frequently used semiconductor materials, namely silicon and silicon carbide, thus enabling the fabrication of novel microelectronic structures and materials. The paper describes how such developments can translate into important practical applications leading to a wide range of technological benefits. Opportunities in ultra-shallow junction formation, heteroepitaxial growth of thin films of cubic silicon carbide on silicon, and crystallization of amorphous silicon films, along with the technical reasons for using flash lamp annealing are discussed in the context of state-of-the-art materials processing. © 2005 IEEE.

The oxidation of CH2O in the intermediate temperature range (943-995 K)

New atmospheric pressure flow reactor data on the oxidation of formaldehyde in the temperature range 943-995 K and over equivalence ratios from 0.013 to 36.7 are reported and discussed. A detailed mechanism assembled from previously published results produced acceptable agreement with the experimental data for the fuel-lean conditions, but failed to predict results for oxidative pyrolysis. Analysis or the very fuel-lean conditions, but failed to modelling results are principally sensitive to CH2O+HO2→HCO+H2O2 (6) and H2O2 +M→OH+OH+M (33). Whereas the specific rate of each reaction cannot be independently determined, it is found that the product k33.k6 is a well defined function of temperature: (3.4±3.0).1028 exp(-(26,800±400)/T). Inadequacies in the mechanism which may be responsible for the disagreement under fuel-rich conditions are discussed. © 1991 Combustion Institute.

Single-gated multiple-mode power semiconductor devices

A new method has been used to design a power semiconductor device which combines IGBT switching and thyristor on-state characteristics. A single gate signal controls the switching and triggers the transitions between the IGBT and thyristor modes of operation. This paper discusses single-gated devices with multiple modes and aspects of their switching behaviour.

Gated three-terminal device architecture to eliminate persistent photoconductivity in oxide semiconductor photosensor arrays

The composition of amorphous oxide semiconductors, which are well known for their optical transparency, can be tailored to enhance their absorption and induce photoconductivity for irradiation with green, and shorter wavelength light. In principle, amorphous oxide semiconductor-based thin-film photoconductors could hence be applied as photosensors. However, their photoconductivity persists for hours after illumination has been removed, which severely degrades the response time and the frame rate of oxide-based sensor arrays. We have solved the problem of persistent photoconductivity (PPC) by developing a gated amorphous oxide semiconductor photo thin-film transistor (photo-TFT) that can provide direct control over the position of the Fermi level in the active layer. Applying a short-duration (10 ns) voltage pulse to these devices induces electron accumulation and accelerates their recombination with ionized oxygen vacancy sites, which are thought to cause PPC. We have integrated these photo-TFTs in a transparent active-matrix photosensor array that can be operated at high frame rates and that has potential applications in contact-free interactive displays. © 2012 Macmillan Publishers Limited. All rights reserved.

Flaw sizing in pipes using long-range guided wave testing

The absence of adequate inspection data from difficult-to-access areas on pipelines, such as cased-road crossings, makes determination of fitness for continued service and compliance with increasingly stringent regulatory requirements problematic. Screening for corrosion using long-range guided wave testing is a relatively new inspection technique. The complexity of the possible modes of vibration means the technique can be difficult to implement effectively but this also means that it has great potential for both detecting and characterizing flaws. The ability to determine flaw size would enable the direct application of standard procedures for determining fitness-for-service, such as ASME B31G, RSTRENG, or equivalent for tens of metres of pipeline from a single inspection location. This paper presents a new technique for flaw sizing using guided wave inspection data. The technique has been developed using finite element models and experimentally validated on 6'' Schedule 40 steel pipe. Some basic fitness-for-service assessments have been carried out using the measured values and the maximum allowable operating pressure was accurately determined. © 2011 American Institute of Physics.

Long range exhaustion-a mathematical model for the axisymmetric air flow of a local exhaust ventilation hood assisted by a turbulent radial jet

Abstract-Mathematical modelling techniques are used to predict the axisymmetric air flow pattern developed by a state-of-the-art Banged exhaust hood which is reinforced by a turbulent radial jet flow. The high Reynolds number modelling techniques adopted allow the complexity of determining the hood's air Bow to be reduced and provide a means of identifying and assessing the various parameters that control the air Bow. The mathematical model is formulated in terms of the Stokes steam function, ψ, and the governing equations of fluid motion are solved using finite-difference techniques. The injection flow of the exhaust hood is modelled as a turbulent radial jet and the entrained Bow is assumed to be an inviscid potential flow. Comparisons made between contours of constant air speed and centre-line air speeds deduced from the model and all the available experimental data show good agreement over a wide range of typical operating conditions. | Mathematical modelling techniques are used to predict the axisymmetric air flow pattern developed by a state-of-the-art flanged exhaust hood which is reinforced by a turbulent radial jet flow. The high Reynolds number modelling techniques adopted allow the complexity of determining the hood's air flow to be reduced and provide a means of identifying and assessing the various parameters that control the air flow. The mathematical model is formulated in terms of the Stokes steam function, Ψ, and the governing equations of fluid motion are solved using finite-difference techniques. The injection flow of the exhaust hood is modelled as a turbulent radial jet and the entrained flow is assumed to be an inviscid potential flow. Comparisons made between contours of constant air speed and centre-line air speeds deduced from the model and all the available experimental data show good agreement over a wide range of typical operating conditions.

End-of-range defects in germanium and their role in boron deactivation

We investigated the thermal evolution of end-of-range (EOR) defects in germanium and their impact on junction thermal stability. After solid-phase epitaxial regrowth of a preamorphized germanium layer, EOR defects exhibiting dislocation loop-like contrast behavior are present. These defects disappear during thermal annealing at 400 °C, while boron electrical deactivation occurs. After the whole defect population vanishes, boron reactivation is observed. These results indicate that germanium self-interstitials, released by EOR defects, are the cause of B deactivation. Unlike in Si, the whole deactivation/reactivation cycle in Ge is found to take place while the maximum active B concentration exceeds its solubility limit. © 2010 American Institute of Physics.

THE SENSITIVITY OF 2D COMPRESSOR INCIDENCE RANGE TO IN-SERVICE GEOMETRIC VARIATION

The loss mechanisms which control 2D incidence range are discussed with an emphasis on determining which real in-service geometric variations will have the largest impact. For the majority of engine compressor blades (Minlet>0.55) both the negative and positive incidence limits are controlled by supersonic patches. It is shown that these patches are highly sensitive to the geometric variations close to, and around the leading edge. The variations used in this study were measured from newly manufactured as well as ex-service blades. Over most the high pressure compressor considered, it was shown that manufacture variations dominated. The first part of the paper shows that, despite large geometric variations (~10% of leading edge thickness), the incidence range responded in a linear way. The result of this is that the geometric variations have little effect on the mean incidence range of a row of blades. In the second part of the paper a region of the design space is identified where non-linear behavior can result in a 10% reduction in positive incidence range. The mechanism for this is reported and design guidelines for its avoidance offered. In the final part of the paper, the linear behavior at negative incidence and the transonic nature of the flow is exploited to design a robust asymmetric leading edge with a 5% increase in incidence range.