119 resultados para lithographic tool


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This paper shows how computational techniques have been used to develop axi-symmetric, straight, sonic-line, minimum length micro nozzles that are suitable for laser micro-machining applications. Gas jets are used during laser micro-machining processing applications to shield the interaction zone between laser and workpiece material, and they determine the machining efficiency of such applications. The paper discusses the nature of laser-material interactions and the importance of using computational fluid dynamics to model pressure distributions in short nozzles that are used to deliver gas to the laser-material interaction zone. Experimental results are presented that highlight unique problems associated with laser micro machining using gas jets.