Design and coupled-effect simulations of CMOS micro gas-sensors built on SOI thin membranes

This paper describes coupled-effect simulations of smart micro gas-sensors based on standard BiCMOS technology. The smart sensor features very low power consumption, high sensitivity and potential low fabrication cost achieved through full CMOS integration. For the first time the micro heaters are made of active CMOS elements (i.e. MOSFET transistors) and embedded in a thin SOI membrane consisting of Si and SiO2 thin layers. Micro gas-sensors such as chemoresistive, microcalorimeteric and Pd/polymer gate FET sensors can be made using this technology. Full numerical analyses including 3D electro-thermo-mechanical simulations, in particular stress and deflection studies on the SOI membranes are presented. The transducer circuit design and the post-CMOS fabrication process, which includes single sided back-etching, are also reported.

Active control of high-frequency vibration: Optimisation using the hybrid modelling method

This work presents active control of high-frequency vibration using skyhook dampers. The choice of the damper gain and its optimal location is crucial for the effective implementation of active vibration control. In vibration control, certain sensor/actuator locations are preferable for reducing structural vibration while using minimum control effort. In order to perform optimisation on a general built-up structure to control vibration, it is necessary to have a good modelling technique to predict the performance of the controller. The present work exploits the hybrid modelling approach, which combines the finite element method (FEM) and statistical energy analysis (SEA) to provide efficient response predictions at medium to high frequencies. The hybrid method is implemented here for a general network of plates, coupled via springs, to allow study of a variety of generic control design problems. By combining the hybrid method with numerical optimisation using a genetic algorithm, optimal skyhook damper gains and locations are obtained. The optimal controller gain and location found from the hybrid method are compared with results from a deterministic modelling method. Good agreement between the results is observed, whereas results from the hybrid method are found in a significantly reduced amount of time. © 2012 Elsevier Ltd. All rights reserved.