COMPARISON OF MILLISECOND ANNEALING OF B IMPLANTS AND ISOTHERMAL ANNEALING FOR TIMES OF A FEW SECONDS.

The annealing behaviour of B implants in the millisecond time regime using a combination of swept line beam and background heating is compared with isothermal annealing with heating cycles of a few seconds. Carrier concentration profiles show that under annealing conditions which restrict diffusion, millisecond processing gives higher activation of B implants than isothermal heating. Transmission electron microscopy shows that millisecond annealing also results in a lower defect density.

RESIDUAL DEFECTS FOLLOWING RAPID ANNEALING OF BORON IMPLANTED SILICON WITH AND WITHOUT PREAMORPHISATION BY SILICON IMPLANTATION.

Implants of boron into silicon which has been made amorphous by silicon implantation have a shallower depth profile than the same implants into silicon. This results in higher activation and restricted diffusion of the B implants after annealing, and there are also significant differences in the microstructure after annealing compared with B implants into silicon. Rapid isothermal heating with an electron beam and furnace treatments are used to characterize the defect structure as a function of time and temperature. Defects are seen to influence the diffusion of non-substitutional boron.

Plume attenuation under high power Nd:yttritium-aluminum-garnet laser welding

During high-power continuous wave (cw) Nd:yttritium-aluminum-garnet (YAG) laser welding a vapor plume is formed containing vaporized material ejected from the keyhole. The gas used as a plume control mechanism affects the plume shape but not its temperature, which has been found to be less than 3000 K, independent of the atmosphere and plume control gases. In this study high-power (up to 8 kW) cw Nd:YAG laser welding has been performed under He, Ar, and N2 gas atmospheres, extending the power range previously studied. The plume was found to contain very small evaporated particles of diameter less than 50 nm. Rayleigh and Mie scattering theories were used to calculate the attenuation coefficient of the incident laser power by these small particles. In addition the attenuation of a 9 W Nd:YAG probe laser beam, horizontally incident across the plume generated by the high-power Nd:YAG laser, was measured at various positions with respect to the beam-material interaction point. Up to 40% attenuation of the probe laser power was measured at positions corresponding to zones of high concentration of vapor plume, shown by high-speed video measurements. These zones interact with the high-power Nd:YAG laser beam path and, can result in significant laser power attenuation. © 2004 Laser Institute of America.

Thin film shape memory alloys for optical sensing applications

Based on shape memory effect of the sputtered thin film shape memory alloys, different types of micromirror structures were designed and fabricated for optical sensing application. Using surface micromachining, TiNi membrane mirror structure has been fabricated, which can be actuated based on intrinsic two-way shape memory effect of the free-standing TiNi film. Using bulk micromachining, TiNi/Si and TiNi/Si 3N 4microcantilever mirror structures were fabricated. © 2007 IOP Publishing Ltd.

Thin film shape memory alloys and microactuators

For Micro-electro-mechanical System (MEMS) applications, TiNi-based thin film Shape Memory Alloys (SMAs) possess many desirable properties, such as high power density, large transformation stress and strain upon heating and cooling, superelasticity and biocompatibility. In this paper, recent development in TiNi-based thin film SMA and microactuator applications is discussed. The topics related to film deposition and characterisation is mainly focused on crystal nucleation and growth during annealing, film thickness effect, film texture, stress induced surface relief, wrinkling and trenches as well as Temperature Memory Effect (TME). The microactuator applications are mainly focused on microvalve and microcage for biological applications, micromirror for optical applications and data storage using nanoindentation method. Copyright © 2009, Inderscience Publishers.

Effect of surface roughness on rarefied-gas heat transfer in microbearings

In this Letter, the rarefaction and roughness effects on the heat transfer process in gas microbearings are investigated. A heat transfer model is developed by introducing two-variable Weierstrass-Mandelbrot (W-M) function with fractal geometry. The heat transfer problem in the multiscale self-affine rough microbearings at slip flow regime is analyzed and discussed. The results show that rarefaction has more significant effect on heat transfer in rough microbearings with lower fractal dimension. The negative influence of roughness on heat transfer found to be the Nusselt number reduction. The heat transfer performance can be optimized with increasing fractal dimension of the rough surface. © 2012 Elsevier B.V. All rights reserved.

Slip flow and heat transfer in microbearings with fractal surface topographies

The effects of random surface roughness on slip flow and heat transfer in microbearings are investigated. A three-dimensional random surface roughness model characterized by fractal geometry is used to describe the multiscale self-affine roughness, which is represented by the modified two-variable Weierstrass- Mandelbrot (W-M) functions, at micro-scale. Based on this fractal characterization, the roles of rarefaction and roughness on the thermal and flow properties in microbearings are predicted and evaluated using numerical analyses and simulations. The results show that the boundary conditions of velocity slip and temperature jump depend not only on the Knudsen number but also on the surface roughness. It is found that the effects of the gas rarefaction and surface roughness on flow behavior and heat transfer in the microbearing are strongly coupled. The negative influence of roughness on heat transfer found to be the Nusselt number reduction. In addition, the effects of temperature difference and relative roughness on the heat transfer in the bearing are also analyzed and discussed. © 2012 Elsevier Ltd. All rights reserved.

Dynamic behaviour of gas jets in laser cutting

The efficiency and overall quality of a laser cutting operation is highly dependent on the assist gas parameters. The desire to cut thicker material has led to the observation of small process operating windows for thicker sections. The gas jet delivery and subsequent dynamical behaviour have significant effects on the cutting operation as the sample thickness increases. To date, few workers have examined the dynamical behaviour of the gas jet. This paper examines the characteristics of oxygen gas jets during CO2 laser cutting of steel. Particular emphasis is placed on the mass transfer effects that are operating within the kerf. Oxygen concentration levels within a model kerf are measured for various laser cutting set-ups. The results show a substantial reduction in oxygen concentration within the kerf. A system for oxygen concentration maintenance is described and cutting results from this system are compared with conventional techniques for cutting steels in the range 10 to 20mm thick. A theoretical analysis of turbulent mass transfer within a kerf is presented and compared with experiment.