Thermal characterization of SOI CMOS micro hot-plate gas sensors

This work reports on thermal characterization of SOI (silicon on insulator) CMOS (complementary metal oxide semiconductor) MEMS (micro electro mechanical system) gas sensors using a thermoreflectance (TR) thermography system. The sensors were fabricated in a CMOS foundry and the micro hot-plate structures were created by back-etching the CMOS processed wafers in a MEMS foundry using DRIE (deep reactive ion etch) process. The calibration and experimental details of the thermoreflectance based thermal imaging setup, used for these micro hot-plate gas sensor structures, are presented. Experimentally determined temperature of a micro hot-plate sensor, using TR thermography and built-in silicon resistive temperature sensor, is compared with that estimated using numerical simulations. The results confirm that TR based thermal imaging technique can be used to determine surface temperature of CMOS MEMS devices with a high accuracy. © 2010 EDA Publishing/THERMINIC.

Study of spike and modal stall phenomena in a low-speed axial compressor

This paper presents a study of stall inception mechanisms a in low-speed axial compressor. Previous work has identified two common flow breakdown sequences, the first associated with a short lengthscale disturbance known as a `spike', and the second with a longer lengthscale disturbance known as a `modal oscillation'. In this paper the physical differences between these two mechanisms are illustrated with detailed measurements. Experimental results are also presented which relate the occurrence of the two stalling mechanisms to the operating conditions of the compressor. It is shown that the stability criteria for the two disturbances are different: long lengthscale disturbances are related to a two-dimensional instability of the whole compression system, while short lengthscale disturbances indicate a three-dimensional breakdown of the flow-field associated with high rotor incidence angles. Based on the experimental measurements, a simple model is proposed which explains the type of stall inception pattern observed in a particular compressor. Measurements from a single stage low-speed compressor and from a multistage high-speed compressor are presented in support of the model.