On-line topographic analysis in the SEM

A novel method for on-line topographic analysis of rough surfaces in the SEM has been investigated. It utilises a digital minicomputer configured to act as a programmable scan generator and automatic focusing unit. The computer is coupled to the microscope through digital-to-analogue converters which enable it to generate ramp waveforms allowing the beam to be scanned over a small sub-region of the field under program control. A further digital-to-analogue converter regulates the current supply to the objective lens of the microscope. The video signal is sampled by means of an analogue-to-digital converter and the resultant binary code stored in the computer's memory as an array of numbers describing relative image intensity. Computations based on the intensity gradient of the image allow the objective lens current to be found for the in-focus condition, which may be related to the working distance through a previous calibration experiment. The sensitivity of the method for detecting small height changes is theoretically of the order of 1 μm. In practice the operator specifies features of interest by means of a mobile spot cursor injected into the SEM display screen, or he may scan the specimen at sub-regions corresponding to pre-determined points on a regular grid defined by him. The operation then proceeds under program control. | A novel method for on-line topographic analysis of rough surfaces in the SEM has been investigated. It utilizes a digital minicomputer configured to act as a programmable scan generator and automatic focusing unit. A further digital-to-analog converter regulates the current supply to the objective lens of the microscope. The video signal is sampled by means of an analog-to-digital converter and the resultant binary code stored in the computer's memory as an array of numbers describing relative image intensity. The sensitivity of the method for detecting small height changes is theroretically of the order of 1 mu m.

An automatic focusing and stigmating system for the SEM

A digital minicomputer has been interfaced with a scanning electron microscope, and programmed to control the excitations of the objective lens and the stigmator of the microscope. The electron beam is scanned by a digital scan generator and the digitised video signal is used for computations. To focus the microscope, a parameter related to the 'sharpness' of the image is maximised, and to set the stigmator, the directional information in the above- and below-focus images is used. | A digital minicomputer has been interfaced with a scanning electron microscope, and programmed to control the excitations of the objective lens and the stigmator of the microscope. The electron beam is scanned by a digital scan generator and the digitized video signal is used for computations. To focus the microscope, a parameter related to the 'sharpness' of the image is maximized, and to set the stigmator, the directional information in the above and below-focus images is used.

ON-LINE STEREO PROCESSING FOR THE SEM.

A convenient system for the rapid extraction of three dimensional information from pairs of SEM images has been constructed, eliminating the need for time-consuming photography. Results are produced in a digestable form. Distortions inherent in the SEM record display and in the photographic system are not relevant to the system described; only those arising within the column and stage need be considered.

Topographical analysis in the SEM using an automatic focusing technique

A novel technique for automated topographical analysis in the SEM has been investigated. It utilizes a 16-bit minicomputer arranged to act as an automatic focusing unit. The computer is coupled to the objective lens of the microscope, by means of a digital to analogue converter, and may regulate the excitation of the lens under program control. Further digital-to-analogue converters allow the computer to act as a programmable scan generator by applying ramp waveforms to the scan amplifiers, permitting the beam to be swept over a small sub-region of the field of interest. The video signal is sampled and applied to an analogue-to-digital converter; the resultant binary numbers are stored in computer memory as an array of values representing relative image intensities within a subregion. A differencing algorithm applied to the collected data allows the level of objective lens excitation to be found at which the sharpness of the image is optimized, and the excitation may be related to the working distance for that subregion through a previous calibration experiment. The sensitivity of the method for detecting small height changes is theoretically of the order of 1 μm.

ANALYSIS OF A PROBLEM INVOLVING RADIAL CONSOLIDATION.

An analytical solution is presented for the vertical consolidation of a cylindrical annulus of clay with horizontal drainage occurring to concentric internal and external drainage boundaries. Numerical results are given for various ratios of internal and external radii and it is shown that solutions for conventional one-dimensional consolidation, and for consolidation of a cylindrical block of clay with drainage only to the outer cylindrical boundary form extremes to the analysis presented here. An application of the solution to the estimation of horizontal permeability of clay is briefly described.