Film bulk acoustic resonator pressure sensor with self temperature reference

A novel film bulk acoustic resonator (FBAR) with two resonant frequencies which have opposite reactions to temperature changes has been designed. The two resonant modes respond differently to changes in temperature and pressure, with the frequency shift being linearly correlated with temperature and pressure changes. By utilizing the FBAR's sealed back trench as a cavity, an on-chip single FBAR sensor suitable for measuring pressure and temperature simultaneously is proposed and demonstrated. The experimental results show that the pressure coefficient of frequency for the lower frequency peak of the FBAR sensors is approximately -17.4 ppm kPa-1, while that for the second peak is approximately -6.1 ppm kPa-1, both of them being much more sensitive than other existing pressure sensors. This dual mode on-chip pressure sensor is simple in structure and operation, can be fabricated at very low cost, and yet requires no specific package, therefore has great potential for applications. © 2012 IOP Publishing Ltd.

Reference frame re-alignment for vector control of the brushless doubly-fed machine

Vector control provides stability and performance when applied to the brushless doubly-fed machine, however cross-coupling effects can arise between inputs and outputs. To address these effects, a procedure is proposed to both visualize and minimize the cross-coupling by means of steady-state mapping and a re-alignment of the dq reference frame. With this method implemented, gain-response tests show improved decoupling across the operating region. © 2013 EUCA.