Flexible pneumatic micro-actuators: Analysis and production

Compliant pneumatic micro-actuators are interesting for applications requiring large strokes and forces in delicate environments. These include for instance minimally invasive surgery and assembly of microcomponents. This paper presents a theoretical and experimental analysis of a balloon-type compliant micro-actuator. Finite element modeling is used to describe the complex behavior of these actuators, which is validated through prototype experiments. Prototypes with dimensions ranging from 11mm × 2mm × 0.24mm to 4mm × 1mm × 0.12mm are fabricated by a newly developed production process based on micromilling and micromolding. The larger actuators are capable of delivering out-of-plane strokes of up to 7mm. Further, they have been integrated in a platform with two rotational and one translational degree of freedom. © 2011 Published by Elsevier Ltd.

Theoretical and experimental analysis of pneumatic balloon microactuators

This paper presents a theoretical and experimental analysis of a biologically inspired balloon-type pneumatic microactuator. The operation principle of pneumatic balloon actuators (PBA's) is based on an asymmetric deflection of two PDMS layers with different thicknesses or different Young's moduli that are bonded together. A new analytical 2D model that describes the complex behavior of these actuators is presented and validated using both 3D FEM models and measurements. The actuators have dimensions ranging from 11 mm × 2 mm × 0.24 mm to 4 mm × 1 mm × 0.12 mm. Their fabrication is based on micromolding of PDMS, and can therefore easily be fabricated in high throughput. Measurements showed that the analytical model provides a qualitative description of the actuator behavior, and showed that the larger actuators are capable of delivering a 7 mm stroke at a supply pressure of 70 kPa and a force of max 22 mN at a supply pressure of 105 kPa. © 2011 Elsevier B.V. All rights reserved.

Pneumatic and hydraulic microactuators: A review

The development of MEMS actuators is rapidly evolving and continuously new progress in terms of efficiency, power and force output is reported. Pneumatic and hydraulic are an interesting class of microactuators that are easily overlooked. Despite the 20 years of research, and hundreds of publications on this topic, these actuators are only popular in microfluidic systems. In other MEMS applications, pneumatic and hydraulic actuators are rare in comparison with electrostatic, thermal or piezo-electric actuators. However, several studies have shown that hydraulic and pneumatic actuators deliver among the highest force and power densities at microscale. It is believed that this asset is particularly important in modern industrial and medical microsystems, and therefore, pneumatic and hydraulic actuators could start playing an increasingly important role. This paper shows an in-depth overview of the developments in this field ranging from the classic inflatable membrane actuators to more complex piston-cylinder and drag-based microdevices. © 2010 IOP Publishing Ltd.

Microsized piston-cylinder pneumatic and hydraulic actuators fabricated by lithography

Future microrobotic applications require actuators that can generate a high actuation force in a limited volume. Up to now, little research has been performed on the development of pneumatic or hydraulic microactuators, although they offer great prospects in achieving high force densities. In addition, large actuation strokes and high actuation speeds can be achieved by these actuators. This paper describes a fabrication process for piston-cylinder pneumatic and hydraulic actuators based on etching techniques, UV-definable polymers, and low-temperature bonding. Prototype actuators with a piston area of 0.15 mm2 have been fabricated in order to validate the production process. These actuators achieve actuation forces of more than 0.1 N and strokes of 750 μm using pressurized air or water as driving fluid. © 2009 IEEE.

Development of a hybrid ferrofluid seal technology for miniature pneumatic and hydraulic actuators

Future microrobotic applications require actuators that can generate a high actuation force and stroke in a limited volume. Up to now, little research has been performed on the development of pneumatic and hydraulic microactuators, although they offer great prospects in achieving high force densities. One of the main technological barriers in the development of these actuators is the fabrication of powerful seals with low leakage. This paper presents a seal technology for linear fluidic microactuators based on ferrofluids. A design and simulation method for these seals has been developed and validated by measurements on miniaturized actuator prototypes. These actuators have an outside diameter of 2 mm, a length of 13 mm and have been tested using both pressurized air and water. Our current actuator prototypes are able to operate at pressures up to 1.6 MPa without leakage. At these pressures, forces up to 0.65 N have been achieved. The stroke of the actuators is 10 mm. © 2009 Elsevier B.V. All rights reserved.

A hybrid surface tension seal for pneumatic and hydraulic microactuators

Recent research revealed that microactuators driven by pressurized fluids are able to generate high power and force densities at microscale. One of the main technological barriers in the development of these actuators is the fabrication low friction seals. This paper presents a novel scalable seal technology, which resists the actuation pressure relying on a combination of a clearance seal and a surface tension seal. This approach allows to seal pressures of more than 800 kPa without leakage. The seal is tested on an actuator with a bore of 0.8 mm2 and a length of 13 mm, which was able to generate forces up to 0.32 N. © 2008 Springer-Verlag.

Characterization and control of a pneumatic microactuator with an integrated inductive position sensor

As the intelligence and the functionality of microrobots increase, there is a growing need to incorporate sensors into these robots. In order to limit the outer dimensions of these microsystems, this research investigates sensors that can be integrated efficiently into microactuators. Here, a pneumatic piston-cylinder microactuator with an integrated inductive position sensor was developed. The main advantage of pneumatic actuators is their high force and power density at microscale. The outside diameter of the actuator is 1.3 mm and the length is 15 mm. The stroke of the actuator is 12 mm, and the actuation force is 1 N at a supply pressure of 1.5 MPa. The position sensor consists of two coils wound around the cylinder of the actuator. The measurement principle is based on the change in coupling factor between the coils as the piston moves in the actuator. The sensor is extremely small since one layer of 25 μm copper wire is sufficient to achieve an accuracy of 10 μm over the total stroke. Position tests with a PI controller and a sliding mode controller showed that the actuator is able to position with an accuracy up to 30 μm. Such positioning systems offer great opportunities for all devices that need to control a large number of degrees of freedom in a restricted volume. © 2007 Elsevier B.V. All rights reserved.

Designing and testing an advanced pneumatic braking system for heavy vehicles

Heavy goods vehicles exhibit poor braking performance in emergency situations when compared to other vehicles. Part of the problem is caused by sluggish pneumatic brake actuators, which limit the control bandwidth of their antilock braking systems. In addition, heuristic control algorithms are used that do not achieve the maximum braking force throughout the stop. In this article, a novel braking system is introduced for pneumatically braked heavy goods vehicles. The conventional brake actuators are improved by placing high-bandwidth, binary-actuated valves directly on the brake chambers. A made-for-purpose valve is described. It achieves a switching delay of 3-4 ms in tests, which is an order of magnitude faster than solenoids in conventional anti-lock braking systems. The heuristic braking control algorithms are replaced with a wheel slip regulator based on sliding mode control. The combined actuator and slip controller are shown to reduce stopping distances on smooth and rough, high friction (μ = 0.9) surfaces by 10% and 27% respectively in hardware-in-the-loop tests compared with conventional ABS. On smooth and rough, low friction (μ = 0.2) surfaces, stopping distances are reduced by 23% and 25%, respectively. Moreover, the overall air reservoir size required on a heavy goods vehicle is governed by its air usage during an anti-lock braking stop on a low friction, smooth surface. The 37% reduction in air usage observed in hardware-in-the-loop tests on this surface therefore represents the potential reduction in reservoir size that could be achieved by the new system. © 2012 IMechE.

Flexible pneumatic twisting actuators

Compliant pneumatic actuators have attracted the interests of the robotics community especially for applications where large strokes are needed in delicate environments. This paper introduces a new type of compliant actuator that generates a large twisting deformation upon pressurization. This deformation is similar to torsion in solid mechanics, and can be characterized by a twisting angle along the longitudinal axis of the actuator. To produce prototype actuators, a new fabrication process is developed that uses soft lithography. With this process, prototype actuators with a width of 7mm and a thickness of 0.65mm have been produced that exhibit a twisting rotation of 6.5 degrees per millimeter length at a pressure of 178kPa. Besides design, fabrication and characterization, this paper will go into detail on stroke optimization. © 2013 IEEE.

Three-dimensional interactions in the rotor of an axial turbine

This article presents a study of the development of the three-dimensional flowfield within the rotor blades of a low-speed, large-scale axial flow turbine. Measurements have been performed in the rotating and stationary frames of reference. Time-mean data have been obtained using miniature five-hole pneumatic probes, whereas the unsteady development of the flow has been determined using three-axis subminiature hot-wire anemometers. Additional information is provided by the results of blade-surface flow-visualization experiments and surface-mounted hot-film anemometers. The development of the stator exit flow, as it passes through the rotor blades, is described. Unsteady data suggest that the presence of the rotor secondary and tip leakage flows restricts the region of unsteady interaction to near midspan when the stator wakes and secondary flows are adjacent to the suction surface. Surface-mounted hot-film data show that this affects the suction-side laminar-turbulent transition process.

An experimental and computational study of the formation of a streamwise shed vortex in a turbine stage

Shear layers shed by aircraft wings roll up into vortices. A similar, though far less common, phenomenon can occur in the wake of a turbomachine blade. This paper presents experimental data from a new single stage turbine that has been commissioned at the Whittle Laboratory. Two low aspect ratio stators have been tested with the same rotor row. Surface flow visualisation illustrates the extremely strong secondary flows present in both NGV designs. These secondary flows lead to conventional passage vortices but also to an intense vortex sheet which is shed from the trailing edge of the blades. Pneumatic probe traverse show how this sheet rolls up into a concentrated vortex in the second stator design, but not in the first. A simple numerical experiment is used to model the shear layer instability and the effects of trailing edge shape and exit yaw angle distribution are investigated. It is found that the latter has a strong influence on shear layer rollup: inhibiting the formation of a vortex downstream of NGV 1 but encouraging it behind NGV 2.

Blade row interaction in a high pressure steam turbine

This paper presents a study of the three-dimensional flow field within the blade rows of a high-pressure axial flow steam turbine stage. Compound lean angles have been employed to achieve relatively low blade loading for hub and tip section and so reduce the secondary losses. The flow field is investigated in a Low-Speed Research Turbine using pneumatic and hot-wire probes downstream of the blade row. Steady and unsteady numerical simulations were performed using structured 3D Navier-Stokes solver to further understand the flow field. Agreement between the simulations and the measurements has been found. The unsteady measurements indicate that there is a significant effect of the stator flow interaction in the downstream rotor blade. The transport of the stator viscous flow through the rotor blade row is described. Unsteady numerical simulations were found to be successful in predicting accurately the flow near the secondary flow interaction regions compared to steady simulations. A method to calculate the unsteady loss generated inside the blade row was developed from the steady numerical simulations. The contribution of various regions in the blade to the unsteady loss generation was evaluated. This method can assist the designer in identifying and optimizing the features of the flow that are responsible for the majority of the unsteady loss production. An analytical model was developed to quantify this effect for the vortex transport inside the downstream blade.