ZnO film based surface acoustic wave micro-pump

In this study, a micro-pump unit based on surface acoustic wave (SAW) on piezoelectric ZnO film is designed and fabricated as a micro-fluidic device. It employs a mechanical wave, which is generated electrically using an aluminum interdigital transducer (IDT), and propagates on the surface of the ZnO film. The ZnO film was used in this study because it has a high electromechanical coefficient and an excellent bonding with various substrate materials, in particular silicon. The sputtering parameters for ZnO film deposition have been optimized, and the ZnO films with different thickness from 1 micron to 5.5 microns were prepared. The film properties have been characterized using different methods, such as scanning electron microscopy, X-ray diffraction and atomic force microscopy. Aluminum IDT with a finger width and spacing of 8 microns was patterned on the ZnO film using a lift-off process. The frequency generated was measured using a network analyzer, and it varies from 130 MHz to 180 MHz as a function of film thickness. A signal generator was used to generate the frequency with a power amplifier to amplify the signal, which was then applied to aluminum IDT to generate the surface acoustic wave. If a liquid droplet exists on the surface carrying the acoustic wave, the energy and the momentum of the SAW will be coupled into the fluid, causing the liquid to vibrate and move on film surface. The strength of this movement is determined by the applied voltage and frequency. The volume of the liquid drop loaded on the SAW device in this study is of several hundreds of nanoliters. The movement of the liquid inside the droplet and also on the ZnO film surface can be demonstrated. The performance of ZnO SAW device was characterized as a function of film thickness. © 2007 IOP Publishing Ltd.

A bone remodelling model coupling micro-damage growth and repair by 3D BMU-activity.

Bone as most of living tissues is able, during its entire lifetime, to adapt its internal microstructure and subsequently its associated mechanical properties to its specific mechanical and physiological environment in a process commonly known as bone remodelling. Bone is therefore continuously renewed and micro-damage, accumulated by fatigue or creep, is removed minimizing the risk of fracture. Nevertheless, bone is not always able to repair itself completely. Actually, if bone repairing function is slower than micro-damage accumulation, a type of bone fracture, usually known as "stress fracture", can finally evolve. In this paper, we propose a bone remodelling continuous model able to simulate micro-damage growth and repair in a coupled way and able therefore to predict the occurrence of "stress fractures". The biological bone remodelling process is modelled in terms of equations that describe the activity of basic multicellular units. The predicted results show a good correspondence with experimental and clinical data. For example, in disuse, bone porosity increases until an equilibrium situation is achieved. In overloading, bone porosity decreases unless the damage rate is so high that causes resorption or "stress fracture".

Dynamical behavior of damped driven coupled single electron simple harmonic oscillators

Coherent coupling between a large number of qubits is the goal for scalable approaches to solid state quantum information processing. Prototype systems can be characterized by spectroscopic techniques. Here, we use pulsed-continuous wave microwave spectroscopy to study the behavior of electrons trapped at defects within the gate dielectric of a sol-gel-based high-k silicon MOSFET. Disorder leads to a wide distribution in trap properties, allowing more than 1000 traps to be individually addressed in a single transistor within the accessible frequency domain. Their dynamical behavior is explored by pulsing the microwave excitation over a range of times comparable to the phase coherence time and the lifetime of the electron in the trap. Trap occupancy is limited to a single electron, which can be manipulated by resonant microwave excitation and the resulting change in trap occupancy is detected by the change in the channel current of the transistor. The trap behavior is described by a classical damped driven simple harmonic oscillator model, with the phase coherence, lifetime and coupling strength parameters derived from a continuous wave (CW) measurement only. For pulse times shorter than the phase coherence time, the energy exchange between traps, due to the coupling, strongly modulates the observed drain current change. This effect could be exploited for 2-qubit gate operation. The very large number of resonances observed in this system would allow a complex multi-qubit quantum mechanical circuit to be realized by this mechanism using only a single transistor.

Superconducting micro-bearings

This paper presents research into superconducting Micro-Bearings for MEMS systems. Advanced silicon processing techniques developed for the Very Large Scale Integration (VLSI) industry have been exploited in recent years to enable the production of micro-engineered moving mechanical systems. These devices commonly known as Micro-ElectroMechanical Systems (MEMS) have many potential advantages. In many respects the effect of scaling a machine from macro-sized to micro-sized are either neutral or beneficial. However in one important respect the scaling produces a severely detrimental effect. That respect is in the tribology and the subsequent wear on the high speed rotating machines. This leads to very short device lifetimes. This paper presents results obtained from a MEMS motor supported on superconducting bearings. The bearings are self-positioning, relying on, the Meissner effect to provide a levitation force which moves the rotor into position and flux pinning to provide stability thereafter. The rotor is driven by a simple electrostatic type motor in which photo resist is used to pattern the motor poles directly onto the rotor. © 2005 IEEE.

Design of carbon nanotubes based microwave applications employing mechanical resonance analysis

Carbon nanotubes (CNTs) have good mechanical properties and unique structural, electronic, thermal, and optical characteristics. In this work, we present the results of our investigations of a resonator device based on embedded vertical CNT arrays. The device's design is based on the mechanical resonance of the tubes. CoventorWare FEA tools have been used to simulate the mechanical resonance frequencies of the vertical nanotubes arrays integrated on a silicon substrate. ©2008 IEEE.

Thermal characterization of SOI CMOS micro hot-plate gas sensors

This work reports on thermal characterization of SOI (silicon on insulator) CMOS (complementary metal oxide semiconductor) MEMS (micro electro mechanical system) gas sensors using a thermoreflectance (TR) thermography system. The sensors were fabricated in a CMOS foundry and the micro hot-plate structures were created by back-etching the CMOS processed wafers in a MEMS foundry using DRIE (deep reactive ion etch) process. The calibration and experimental details of the thermoreflectance based thermal imaging setup, used for these micro hot-plate gas sensor structures, are presented. Experimentally determined temperature of a micro hot-plate sensor, using TR thermography and built-in silicon resistive temperature sensor, is compared with that estimated using numerical simulations. The results confirm that TR based thermal imaging technique can be used to determine surface temperature of CMOS MEMS devices with a high accuracy. © 2010 EDA Publishing/THERMINIC.

Micro-measurement and monitoring system for ageing underground infrastructure (Underground M3)

Advances in the development of computer vision, miniature Micro-Electro-Mechanical Systems (MEMS) and Wireless Sensor Network (WSN) offer intriguing possibilities that can radically alter the paradigms underlying existing methods of condition assessment and monitoring of ageing civil engineering infrastructure. This paper describes some of the outcomes of the European Science Foundation project "Micro-Measurement and Monitoring System for Ageing Underground Infrastructures (Underground M3)". The main aim of the project was to develop a system that uses a tiered approach to monitor the degree and rate of tunnel deterioration. The system comprises of (1) Tier 1: Micro-detection using advances in computer vision and (2) Tier 2: Micro-monitoring and communication using advances in MEMS and WSN. These potentially low-cost technologies will be able to reduce costs associated with end-of-life structures, which is essential to the viability of rehabilitation, repair and reuse. The paper describes the actual deployment and testing of these innovative monitoring tools in tunnels of London Underground, Prague Metro and Barcelona Metro. © 2012 Taylor & Francis Group.

Mechanical response of carbon fiber composite sandwich panels with pyramidal truss cores

The combination of light carbon fiber reinforced polymer (CFRP) composite materials with structurally efficient sandwich panel designs offers novel opportunities for ultralight structures. Here, pyramidal truss sandwich cores with relative densities ρ̄ in the range 1-10% have been manufactured from carbon fiber reinforced polymer laminates by employing a snap-fitting method. The measured quasi-static shear strength varied between 0.8 and 7.5 MPa. Two failure modes were observed: (i) Euler buckling of the struts and (ii) delamination failure of the laminates. Micro-buckling failure of the struts was not observed in the experiments reported here while Euler buckling and delamination failures occurred for the low (ρ̄≤1%) and high (ρ̄>1%) relative density cores, respectively. Analytical models for the collapse of the composite cores by these failure modes are presented. Good agreement between the measurements and predictions based on the Euler buckling and delamination failure of the struts is observed while the micro-buckling analysis over-predicts the measurements. The CFRP pyramidal cores investigated here have a similar mechanical performance to CFRP honeycombs. Thus, for a range of multi-functional applications that require an "open-celled" architecture (e.g. so that cooling fluid can pass through a sandwich core), the CFRP pyramidal cores offer an attractive alternative to honeycombs. © 2012 Elsevier Ltd. All rights reserved.

Enhanced infra-red emission from sub-millimeter microelectromechanical systems micro hotplates via inkjet deposited carbon nanoparticles and fullerenes

In this paper, we demonstrate a micro-inkjet printing technique as a reproducible post-process for the deposition of carbon nanoparticles and fullerene adlayers onto fully CMOS compatible micro-electro-mechanical silicon-on-insulator infrared (IR) light sources to enhance their infrared emission. We show experimentally a significant increase in the infrared emission efficiency of the coated emitters. We numerically validate these findings with models suggesting a dominant performance increase for wavelengths <5.5 μm. Here, the bimodal size distribution in the diameter of the carbon nanoparticles, relative to the fullerenes, is an effective mediator towards topologically enhanced emittance of our miniaturised emitters. A 90% improvement in IR emission power density has been shown which we have rationalised with an increase in the mean thickness of the deposited carbon nanoparticle adlayer. © 2013 AIP Publishing LLC.

Modeling nonlinearities in MEMS oscillators

We present a mathematical model of a microelectromechanical system (MEMS) oscillator that integrates the nonlinearities of the MEMS resonator and the oscillator circuitry in a single numerical modeling environment. This is achieved by transforming the conventional nonlinear mechanical model into the electrical domain while simultaneously considering the prominent nonlinearities of the resonator. The proposed nonlinear electrical model is validated by comparing the simulated amplitude¿frequency response with measurements on an open-loop electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. Next, the essential nonlinearities in the oscillator circuit are investigated and a mathematical model of a MEMS oscillator is proposed that integrates the nonlinearities of the resonator. The concept is illustrated for MEMS transimpedance-amplifier-based square-wave and sine-wave oscillators. Closed-form expressions of steady-state output power and output frequency are derived for both oscillator models and compared with experimental and simulation results, with a good match in the predicted trends in all three cases. © 1986-2012 IEEE.

Synchronization in a coupled architecture of microelectromechanical oscillators

There has been much recent interest in engineering the phenomenon of synchronization in coupled micro-/nano-scale oscillators for applications ranging from precision time and frequency references to new approaches to information processing. This paper presents descriptive modelling detail and further experimental validation of the phenomenon of mutual synchronization in coupled MEMS oscillators building upon recent experimental validation of this concept by the present authors. In particular, the underlying dependence of the observation of synchronization on system parameters is studied through numerical and analytical modelling while considering essential nonlinearities in both the resonator and circuit domain. Experimental results demonstrating synchronized response are elaborated based on the realization of electrically coupled MEMS resonator based square-wave oscillators. The experimental results on frequency entrainment are found to be in general agreement with results obtained through analytical modeling and numerical simulation. The concept presented here is scalable and could be used to investigate the dynamics of large-arrays of coupled MEMS oscillators. © 2014 AIP Publishing LLC.