Low-temperature (≤600 °C) semi-insulating oxygen-doped silicon films by the PECVD technique for large-area power applications

This work describes the deposition, annealing and characterisation of semi-insulating oxygen-doped silicon films at temperatures compatible with polysilicon circuitry on glass. The semi-insulating layers are deposited by the plasma enhanced chemical vapour deposition technique from silane (SiH4), nitrous oxide (N2O) and helium (He) gas mixtures at a temperature of 350 °C. The as-deposited films are then furnace annealed at 600 °C which is the maximum process temperature. Raman analysis shows the as-deposited and annealed films to be completely amorphous. The most important deposition variable is the N2O SiH4 gas ratio. By varying the N2O SiH4 ratio the conductivity of the annealed films can be accurately controlled, for the first time, down to a minimum of ≈10-7Ω-1cm-1 where they exhibit a T -1 4 temperature dependence indicative of a hopping conduction mechanism. Helium dilution of the reactant gases is shown to improve both film uniformity and reproducibility. A model for the microstructure of these semi-insulating amorphous oxygen-doped silicon films is proposed to explain the observed physical and electrical properties. © 1995.

Low temperature (≤ 600°C) semi-insulating oxygen-doped silicon films by the PECVD technique for large area power applications

This work describes the annealing and characterisation of semi-insulating oxygen-doped silicon films deposited by the Plasma Enhanced Chemical Vapour Deposition (PECVD) technique from silane (SiH4), nitrous oxide (N2O) and helium (He) gas mixtures. The maximum process temperature is chosen to be compatible with large area polycrystalline silicon (poly-Si) circuitry on glass. The most important deposition variable is shown to be the N2O SiH4 gas ratio. Helium dilution results in improved film uniformity and reproducibility. Raman analysis shows the 'as-deposited' and annealed films to be completely amorphous. A model for the microstructure of these Semi-Insulating Amorphous Oxygen-doped Silicon (SIAOS) films is proposed to explain the observed physical and electrical properties. © 1995.

Robust design optimization of gas turbine compression systems

Gas turbine compression systems are required to perform adequately over a range of operating conditions. Complexity has encouraged the conventional design process for compressors to focus initially on one operating point, usually the most commonor arduous, to draw up an outline design. Generally, only as this initial design is refined is its offdesign performance assessed in detail. Not only does this necessarily introduce a potentially costly and timeconsuming extra loop in the design process, but it also may result in a design whose offdesign behavior is suboptimal. Aversion of nonintrusive polynomial chaos was previously developed in which a set of orthonormal polynomials was generated to facilitate a rapid analysis of robustness in the presence of generic uncertainties with good accuracy. In this paper, this analysis method is incorporated in real time into the design process for the compression system of a three-shaft gas turbine aeroengine. This approach to robust optimization is shown to lead to designs that exhibit consistently improved system performance with reduced sensitivity to offdesign operation.

Linking energy policy, electricity generation and transmission using strong sustainability and co-optimization

The design of a sustainable electricity generation and transmission system is based on the established science of anthropogenic climate change and the realization that depending on imported fossil-fuels is becoming a measure of energy insecurity of supply. A model is proposed which integrates generation fuel mix composition, assignment of plants and optimized power flow, using Portugal as a case study. The result of this co-optimized approach is an overall set of generator types/fuels which increases the diversity of Portuguese electricity supply, lowers its dependency on imported fuels by 14.62% and moves the country towards meeting its regional and international obligations of 31% energy from renewables by 2020 and a 27% reduction in greenhouse gas emissions by 2012, respectively. The quantity and composition of power generation at each bus is specified, with particular focus on quantifying the amount of distributed generation. Based on other works, the resultant, overall distributed capacity penetration of 19.02% of total installed generation is expected to yield positive network benefits. Thus, the model demonstrates that national energy policy and technical deployment can be linked through sustainability and, moreover, that the respective goals may be mutually achieved via holistic, integrated design. ©2009 IEEE.