Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

This paper reports on the design and electrical characterization of a single crystal silicon micromechanical square-plate resonator. The microresonator has been excited in the anti-symmetrical wine glass mode at a resonant frequency of 5.166 MHz and exhibits an impressive quality factor (Q) of 3.7 × 106 at a pressure of 33 mtorr. The device has been fabricated in a commercial foundry process. An associated motional resistance of approximately 50 kΩ using a dc bias voltage of 60 V is measured for a transduction gap of 2 νm due to the ultra-high Q of the resonator. This result corresponds to a frequency-Q product of 1.9 × 1013, the highest reported for a fundamental mode single-crystal silicon resonator and on par with some of the best quartz crystal resonators. The results are indicative of the superior performance of silicon as a mechanical material, and show that the wine glass resonant mode is beneficial for achieving high quality factors allowed by the material limit. © 2009 IOP Publishing Ltd.

Investigation of spatial repeatability using a tire force measuring mat

A portable mat for measuring the dynamic tire forces of commercial vehicles is described. The mat is 56 m long and 13 mm thick and has 141 capacitative strip sensors spaced at 0.4-m intervals. The accuracy of the mat for measuring dynamic tire forces generated by heavy commercial vehicles is assessed using an instrumented vehicle. The spatial repeatability of dynamic wheel loads generated by 14 uninstrumented articulated vehicles is investigated, and it is concluded that approximately half of the vehicles tested are likely to contribute to a repeatable pattern of road loading.