Increased carbon nanotube area density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach

We used a cyclic reactive ion etching (RIE) process to increase the Co catalyst density on a cobalt disilicide (CoSi2) substrate for carbon nanotube (CNT) growth. Each cycle of catalyst formation consists of a room temperature RIE step and an annealing step at 450 °C. The RIE step transfers the top-surface of CoSi2 into cobalt fluoride; while the annealing reduces the fluoride into metallic Co nanoparticles. We have optimized this cyclic RIE process and determined that the catalyst density can be doubled in three cycles, resulting in a final CNT shell density of 6.6 × 10 11 walls·cm-2. This work demonstrates a very effective approach to increase the CNT density grown directly on silicides. © 2014 AIP Publishing LLC.

Soft robotics: The next generation of intelligent machines

There has been an increasing interest in applying biological principles to the design and control of robots. Unlike industrial robots that are programmed to execute a rather limited number of tasks, the new generation of bio-inspired robots is expected to display a wide range of behaviours in unpredictable environments, as well as to interact safely and smoothly with human co-workers. In this article, we put forward some of the properties that will characterize these new robots: soft materials, flexible and stretchable sensors, modular and efficient actuators, self-organization and distributed control. We introduce a number of design principles; in particular, we try to comprehend the novel design space that now includes soft materials and requires a completely different way of thinking about control. We also introduce a recent case study of developing a complex humanoid robot, discuss the lessons learned and speculate about future challenges and perspectives.