Investigating carbon materials for use as the electron emission source in a parallel electron-beam lithography system

A microelectronic parallel electron-beam lithography system using an array of field emitting microguns is currently being developed. This paper investigates the suitability of various carbon based materials for the electron source in this device, namely tetrahedrally bonded amorphous carbon (ta-C), nanoclustered carbon and carbon nanotubes. Ta-C was most easily integrated into a gated field emitter structure and various methods, such as plasma and heavy ion irradiation, were used to induce emission sites in the ta-C. However, the creation of such emission sites at desired locations appeared to be difficult/random in nature and thus the material was unsuitable for this application. In contrast, nanoclustered carbon material readily field emits with a high site density but the by-products from the deposition process create integration issues when using the material in a microelectronic gated structure. Carbon nanotubes are currently the most promising candidate for use as the emission source. We have developed a high yield and clean (amorphous carbon by-product free) PECVD process to deposit single free standing nanotubes at desired locations with exceptional uniformity in terms of nanotube height and diameter. Field emission from an array of nanotubes was also obtained. © 2001 Elsevier Science B.V.

Demonstration of a compact InGaAsP active crosspoint switch operating at 1.5 μm using novel reflective y-coupler components

An extremely compact active optoelectronic crosspoint switch, having overall dimensions of 400 μm×200 μm, is reported. The device provides unity facet-to-facet gain for both bar and cross state operation for TE or TM input signals.

Microstructural optimization of cellular acoustic materials

A microstructure based acoustic model is introduced, which can be used to optimize the microstructure of cellular materials and thus to obtain their optimal acoustic property. This acoustic model is an unsteady one which is appropriate in the limit of low Reynolds numbers. The model involves three elements. This first involves the propagation of acoustic waves passing the cylinders whose axes are aligned parallel to the direction of propagation. The second model relates to the propagation of acoustic waves passing the cylinders whose axes are aligned perpendicular to the direction of propagation. In both cases the interaction between adjacent cylinders is taken into account by considering the effect of polygonal periodic boundary conditions. As these two models are linear they are combined to give the characteristics of propagation at arbitrary incidence. The third model involves propagation passing spheres in order to represent the joints. Heat transfer is also included. These three models are then used to expand the design space and calculate the optimum cell structure for desired acoustic performance in a number of different applications. Moreover, the application fields are also analyzed.