TRANSIENT SCANNING ELECTRON BEAM ANNEALING METHODS USED TO STUDY DIFFUSION AND DEFECTS IN IMPLANTED SILICON.

Rapid thermal annealing of arsenic and boron difluoride implants, such as those used for source/drain regions in CMOS, has been carried out using a scanning electron beam annealer, as part of a study of transient diffusion effects. Three types of e-beam anneal have been performed, with peak temperatures in the range 900 -1200 degree C; the normal isothermal e-beam anneals, together with sub-second fast anneals and 'dual-pulse' anneals, in which the sample undergoes an isothermal pre-anneal followed by rapid heating to the required anneal temperature is less than 0. 5s. The diffusion occuring during these anneal cycles has been modelled using SPS-1D, an implant and diffusion modelling program developed by one of the authors. This has been modified to incorporate simulated temperature vs. time cycles for the anneals. Results are presented applying the usual equilibrium clustering model, a transient point-defect enhancement to the diffusivity proposed recently by Fair and a new dynamic clustering model for arsenic. Good agreement with SIMS measurements is obtained using the dynamic clustering model, without recourse to a transient defect model.

Optimization of nanotube electrode geometry in a liquid crystal media from wavefront aberrations

This paper presents experimental optimization of number and geometry of nanotube electrodes in a liquid crystal media from wavefront aberrations for realizing nanophotonic devices. The refractive-index gradient profiles from different nanotube geometries-arrays of one, three, four, and five-were studied along with wavefront aberrations using Zernike polynomials. The optimizations help the device to make application in the areas of voltage reconfigurable microlens arrays, high-resolution displays, wavefront sensors, holograms, and phase modulators. © 2012 Optical Society of America.

Effects of flow geometry and Damkohler number on turbulent premixed flame

DNS of planar turbulent flame and turbulent V-flame has been conducted to investigate turbulence-scalar interaction in relatively practical turbulent combustion. Several turbulence quantities are examined for the understandings of fundamental characteristics of flow field in V-flame. Due to the additional turbulence production by the hot-rod, turbulence does not simply decay in V-flame. Turbulence-scalar interaction, scalar alignments with the principal strain rate in other words, is then clarified. The competition of turbulence and dilatation can be found in the conditional PDF of flame normal alignment. The results suggests that the alignment characteristics in high Da flames are applicable to low Da flames in the region of intense heat release.

SIMPLE REMESHING SCHEME FOR THE FINITE ELEMENT BASED SIMULATION OF DOPANT DIFFUSION IN SILICON.

Process simulation programs are valuable in generating accurate impurity profiles. Apart from accuracy the programs should also be efficient so as not to consume vast computer memory. This is especially true for devices and circuits of VLSI complexity. In this paper a remeshing scheme to make the finite element based solution of the non-linear diffusion equation more efficient is proposed. A remeshing scheme based on comparing the concentration values of adjacent node was then implemented and found to remove the problems of oscillation.

Nonsmooth geometry and collapse of flexible structures under smooth loads

While static equilibria of flexible strings subject to various load types (gravity, hydrostatic pressure, Newtonian wind) is well understood textbook material, the combinations of the very same loads can give rise to complex spatial behaviour at the core of which is the unilateral material constraint prohibiting compressive loads. While the effects of such constraints have been explored in optimisation problems involving straight cables, the geometric complexity of physical configurations has not yet been addressed. Here we show that flexible strings subject to combined smooth loads may not have smooth solutions in certain ranges of the load ratios. This non-smooth phenomenon is closely related to the collapse geometry of inflated tents. After proving the nonexistence of smooth solutions for a broad family of loadings we identify two alternative, critical geometries immediately preceding the collapse. We verify these analytical results by dynamical simulation of flexible chains as well as with simple table-top experiments with an inflated membrane.

The geometry and the number of contacts of monodisperse sphere packs using X-ray tomography

The three-dimensional structure of very large samples of monodisperse bead packs is studied by means of X-Ray Computed Tomography. We retrieve the coordinatesofeach bead inthe pack and wecalculate the average coordination number by using the tomographic images to single out the neighbors in contact. The results are compared with the average coordination number obtained in Aste et al. (2005) by using a deconvolution technique. We show that the coordination number increases with the packing fraction, varying between 6.9 and 8.2 for packing fractions between 0.59 and 0.64. © 2005 Taylor & Francis Group.