Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

A novel type of linear extensometer with exceptionally high resolution of 4 nm based on MEMS resonant strain sensors bonded on steel and operating in a vacuum package is presented. The tool is implemented by means of a steel thin bar that can be pre-stressed in tension within two fixing anchors. The extension of the bar is detected by using two vacuum-packaged resonant MEMS double- ended tuning fork (DETF) sensors bonded on the bar with epoxy glue, one of which is utilized for temperature compensation. Both sensors are driven by a closed loop self-oscillating transresistance amplifier feedback scheme implemented on a PCB (Printed Circuit Board). On the same board, a microcontroller-based frequency measurement circuit is also implemented, which is able to count the square wave fronts of the MEMS oscillator output with a resolution of 20 nsec. The system provides a frequency noise of 0.2 Hz corresponding to an extension resolution of 4 nm for the extensometer. Nearly perfect temperature compensation of the frequency output is achieved in the temperature range 20-35 C using the reference sensor. © 2011 IEEE.

Phase noise analysis of a mechanical autonomous impact oscillator with a MEMS resonator

In this paper, phase noise analysis of a mechanical autonomous impact oscillator with a MEMS resonator is performed. Since the circuit considered belongs to the class of hybrid systems, methods based on the variational model for the evaluation of either phase noise or steady state solutions cannot be directly applied. As a matter of fact, the monodromy matrix is not defined at impact events in these systems. By introducing saltation matrices, this limit is overcome and the aforementioned methods are extended. In particular, the unified theory developed by Demir is used to analyze the phase noise after evaluating the asymptotically stable periodic solution of the system by resorting to the shooting method. Numerical results are presented to show how noise sources affect the phase noise performances. © 2011 IEEE.

Electrically coupled MEMS oscillators

In this paper, we demonstrate synchronization of two electrically coupled MEMS oscillators incorporating nearly identical silicon tuning fork microresonators. It is seen that as the output of the oscillators are coupled, they exhibit a synchronized response wherein the output amplitudes and signal-to-noise ratios of the two oscillators are improved relative to the case where the two oscillators are uncoupled. The observed output frequency of each oscillator before coupling is 219402.4 Hz and 219403.6 Hz respectively. In contrast, when the oscillators are driven simultaneously, they lock at a common output frequency of 219401.3 Hz and their outputs are found to be out-of-phase with respect to each other. A 6 dBm gain in output power and a reduction in the phase fluctuations of the output signal are observed for the coupled oscillators compared to the case when the oscillators are uncoupled. © 2011 IEEE.

Application of the fractional Fourier transform to the design of LCOS based optical interconnects and fiber switches

It is shown that reflective liquid crystal on silicon (LCOS) spatial light modulator (SLM) based interconnects or fiber switches that use defocus to reduce crosstalk can be evaluated and optimized using a fractional Fourier transform if certain optical symmetry conditions are met. Theoretically the maximum allowable linear hologram phase error compared to a Fourier switch is increased by a factor of six before the target crosstalk for telecom applications of -40 dB is exceeded. A Gerchberg-Saxton algorithm incorporating a fractional Fourier transform modified for use with a reflective LCOS SLM is used to optimize multi-casting holograms in a prototype telecom switch. Experiments are in close agreement to predicted performance. © 2012 Optical Society of America.

Experience using MEMS-based accelerometers in dynamic testing

Measurement of acceleration in dynamic tests is carried out routinely, and in most cases, piezoelectric accelerometers are used at present. However, a new class of instruments based on MEMS technology have become available and are gaining use in many applications due to their small size, low mass and low-cost. This paper describes a centrifuge lateral spreading experiment in which MEMS and piezoelectric accelerometers were placed at similar depths. Good agreement was obtained when the instruments were located in dense sands, but significant differences were observed in loose, liquefiable soils. It was found that the performance of the piezoelectric accelerometer is poor at low frequency, and that the relative phase difference between the piezoelectric and MEMS accelerometer varies significantly at low frequency. © 2010 Taylor & Francis Group, London.

Use of wavefront encoding in optical interconnects and fiber switches for cross talk mitigation

A technique of cross talk mitigation developed for liquid crystal on silicon spatial light modulator based optical interconnects and fiber switches is demonstrated. By purposefully introducing an appropriate aberration into the system, it is possible to reduce the worst-case cross talk by over 10 dB compared to conventional Fourier-transform-based designs. Tests at a wavelength of 674nm validate this approach, and show that there is no noticeable reduction in diffraction efficiency. A 27% spot increase in beam diameter is observed, which is predicted to reduce at longer datacom and telecom wavelengths. © 2012 Optical Society of America.