Development of all metal electrothermal actuator and its applications

The in-plane motion of microelectrothermal actuator ("heatuator") has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ∼60% larger than that of a Si-based actuator under the same power consumption. Metals are much better for thermal actuators as they provide a relatively large deflection and large force, for a low operating temperature and power consumption. Electroplated Ni films were used to fabricate heatuators. The electrical and mechanical properties of electroplated Ni thin films have been investigated as a function of temperature and plating current density, and the process conditions have been optimized to obtain stress-free films suitable for microelectromechanical systems applications. Lateral thermal actuators have been successfully fabricated, and electrically tested. Microswitches and microtweezers utilizing the heatuator have also been fabricated and tested. © 2005 Society of Photo-Optical Instrumentation Engineers.

Ready configuration of machines into an existing manufacturing system

This paper focuses on simplifying and easing the integration of a new machine into an existing conventional hierarchical manufacturing system. Based on a distributed manufacturing paradigm, it proposes the functions and interfaces that a new machine and an existing manufacturing system should possess so that ready and simple configuration of additional machines can be achieved. The configuration process is intended to include, not only mechanical and electrical interfaces, but also decision system interfaces (such as planning, scheduling, and shop-floor control). Preliminary laboratory experiments to compare the reconfigurability resulting from a conventional integration method and the proposed distributed method are presented and discussed. © 2007 ISAM.