Theoretical performance of a coiled coil piezoelectric bimorph

The electromechanical coupling behaviour of a novel, highly coiled piezoelectric strip structure is developed in full, in order to expound its performance and efficiency. The strip is doubly coiled for compactness and, compared to a standard straight actuator of the same cross-section, it is shown that the actuator here offers better generative forces and energy conversion, and substantial actuated displacements, however, at the expense of a much lower stiffness. The device is therefore proposed for high-displacement, quasi-static applications. © 2006 Elsevier B.V. All rights reserved.

Development of all metal electrothermal actuator and its applications

The in-plane motion of microelectrothermal actuator ("heatuator") has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ∼60% larger than that of a Si-based actuator under the same power consumption. Metals are much better for thermal actuators as they provide a relatively large deflection and large force, for a low operating temperature and power consumption. Electroplated Ni films were used to fabricate heatuators. The electrical and mechanical properties of electroplated Ni thin films have been investigated as a function of temperature and plating current density, and the process conditions have been optimized to obtain stress-free films suitable for microelectromechanical systems applications. Lateral thermal actuators have been successfully fabricated, and electrically tested. Microswitches and microtweezers utilizing the heatuator have also been fabricated and tested. © 2005 Society of Photo-Optical Instrumentation Engineers.