Airborne ultrasonic vortex generation using flexible ferroelectrets

Cellular ferroelectrets exhibit interesting electromechanical- acoustical characteristics. Their recent appearance and remarkable properties open up new possibilities for the design and development of ultrasonic transducers. In particular, the feasibility of fabricating ultrasonic vortex generators using ferroelectret films is demonstrated in this work. To this end, a transducer prototype was built by gluing the material onto a tangential-helical surface (outer diameter: 40 mm, pitch: 3.45 mm). Experimental results agree well with the theoretical estimation of the pressure and phase of the acoustic field in the near field and far field, which corroborates the potential of ferroelectrets to customize special acoustic fields. Furthermore, the proposed fabrication procedure is inexpensive and represents a new alternative for exploring and analyzing the special characteristics of acoustical helical wavefronts

High-Acoustic-Impedance Tantalum Oxide Layers for Insulating Acoustic Reflectors

This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors for solidly mounted resonators operating in the gigahertz frequency range. The films are grown by sputtering a metallic tantalum target under different oxygen and argon gas mixtures, total pressures, pulsed dc powers, and substrate biases. The structural properties of the films are assessed through infrared absorption spectroscopy and X-ray diffraction measurements. Their acoustic impedance is assessed by deriving the mass density from X-ray reflectometry measurements and the acoustic velocity from picosecond acoustic spectroscopy and the analysis of the frequency response of the test resonators.

Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films

We investigate the excitation and propagation of acoustic waves in polycrystalline aluminum nitride films along the directions parallel and normal to the c-axis. Longitudinal and transverse propagations are assessed through the frequency response of surface acoustic wave and bulk acoustic wave devices fabricated on films of different crystal qualities. The crystalline properties significantly affect the electromechanical coupling factors and acoustic properties of the piezoelectric layers. The presence of misoriented grains produces an overall decrease of the piezoelectric activity, degrading more severely the excitation and propagation of waves traveling transversally to the c-axis. It is suggested that the presence of such crystalline defects in c-axis-oriented films reduces the mechanical coherence between grains and hinders the transverse deformation of the film when the electric field is applied parallel to the surface.