Fabrication of sub-100 nm IDT SAW devices on insulating, semiconducting and conductive substrates

This work describes the electron-beam (e-beam) lithography process developed to manufacture nano interdigital transducers (IDTs) to be used in high frequency (GHz) surface acoustic wave (SAW) applications. The combination of electron-beam (e-beam) lithography and lift-off process is shown to be effective in fabricating well-defined IDT finger patterns with a line width below 100 nm with a good yield. Working with insulating piezoelectric substrates brings about e-beam deflection. It is also shown how a very thin organic anti-static layer works well in avoiding this charge accumulation during e-beam lithography on the resist layer. However, the use of this anti-static layer is not required with the insulating piezoelectric layer laying on a semiconducting substrate such as highly doped silicon. The effect of the e-beam dose on a number of different layers (of insulating, insulating on semiconducting, semiconducting, and conductive natures) is provided. Among other advantages, the use of reduced e-beam doses increases the manufacturing time. The principal aim of this work is to explain the interrelation among e-beam dose, substrate nature and IDT structure. An extensive study of the e-beam lithography of long IDT-fingers is provided, in a wide variety of electrode widths, electrode numbers and electrode pitches. It is worthy to highlight that this work shows the influence of the e-beam dose on five substrates of different conductive nature

The ion beam shepherd: A new concept for asteroid deflection

A novel slow push asteroid deflection strategy has been recently proposed in which an Earth threatening asteroid can be deflected by exploiting the momentum transmitted by a collimated beam of quasi-neutral plasma impinging against the asteroid surface. The beam can be generated with state-of-the art ion engines from a hovering spacecraft with no need for physical attachment or gravitational interaction with the celestial body. The spacecraft, placed at a distance of a few asteroid diameters, would need an ion thruster pointed at the asteroid surface as well as a second propulsion system to compensate for the ion engine reaction and keep the distance between the asteroid and the shepherd satellite constant throughout the deflection phase. A comparison in terms of required spacecraft mass per total imparted deflection impulse shows that the method outperforms the gravity tractor concept by more than one order of magnitude for asteroids up to about 200 m diameter. The two methods would yield comparable performance for asteroids larger than about 2 km

Floating bare tether as upper atmosphere probe

Use of a conductive bare tape electrically floating in low Earth orbit as an effective electron beam source to produce artificial auroral effects, free of problems that mard tandard beams, is considered. Ambient ions impacting the tape with keV energies over most of its length liberate secondary electrons that race down the magnetic field, excite neutrals in the E layer, and result in auroral emissions. The tether would operate with both a power supply and a plasma contactor off at nighttime; power and contactor would be on at daytime for reboost. Tomographic analysis of auroral emissions from the footprint of the beam, as observed from the spacecraft, can provide density profiles of dominant neutral species in the E layer. A characteristic tether system, at altitude 300 km and moderate orbital inclination, would involve an aluminum tape with a length of 20 km, a width of 15 mm, and a thickness of 0.2 mm for a full-system mass around 1200 kg, with two thirds going into the power subsystem.

The SIROCO Asteroid Deflection Demonstrator

There is evidence of past Near-Earth-Objects (NEOs) impacts on Earth and several studies indicating that even relatively small objects are capable of causing large local damage, either directly or in combination with other phenomena, e.g. tsunamis. This paper describes a space mission concept to demonstrate some of the key technologies to rendezvous with an asteroid and accurately measure its trajectory during and after a deflection maneuver. The mission, called SIROCO, makes use of the recently proposed ion beam shepherd (IBS) concept where a stream of accelerated plasma ions is directed against the surface of a small NEO resulting in a net transmitted deflection force. We show that by carefully selecting the target NEO a measurable deflection can be obtained in a few weeks of continuous thrust with a small spacecraft and state of the art electric propulsion hardware.

An extended electron beam for auroral studies

An electrically floating metallic bare tether in a low Earth orbit would be highly negative with respect to the ambient plasma over most of its length, and would be bombarded by ambient ions. This would liberate secondary electrons, which, after acceleration through the same voltage, would form a magnetically guided two-sided planar e-beam. Upon impact on the atmospheric E-layer, at about 120-140 Km altitude auroral effects (ionization and light emission) can be expected. This paper examines in a preliminary way the feasibility of using this effect as an upper atmospheric probe. It is concluded that significant perturbations can be produced along the illuminated planar sheet of the atmosphere, with ionization rates of several thousand cm-3 sec1. Observation of the induced optical emission is made difficult by the narrowness and high moving speed of the illuminated zone, but it is shown that vertical resolution of single spectral lines is possible, as is wider spectral coverage with no vertical resolution.

An upper atmospheric probe for auroral effects

An electrically floating bare tether in LEO orbit may serve as upper atmospheric probe. Ambient ions bombard the negatively biased tether and liberate secondary electrons, which accelerate through the same voltage to form a magnetically guided planar e-beam resulting in auroral effects at the E-layer. This beam is free from the S/C charging and plasma interaction problems of standard e-beams. The energy flux is weak but varies accross the large beam cross section, allowing continuous observation from the S/C. A brightness scan of line-integrated emissions, that mix emitting altitudes and tether points originating the electrons, is analysed. The tether is magnetically dragged at nighttime operation, when power supply and plasma contactor at the S/C are off for electrical floating; power and contactor are on at daytime for partial current reversal, resulting in thrust. System requirements for keeping average orbital height are discussed.

Floating Bare Tether as Upper Atmosphere Probe

Use of a (bare) conductive tape electrically floating in LEO as an effective e-beam source that produces artificial auroras, and is free of problems that have marred standard beams, is considered. Ambient ions impacting the tape with KeV energies over most of its length liberate secondary electrons, which race down the magnetic field and excite neutrals in the E-layer, resulting in auroral emissions. The tether would operate at night-time with both a power supply and a plasma contactor off; power and contactor would be on at daytime for reboost. The optimal tape thickness yielding a minimum mass for an autonomous system is determined; the alternative use of an electric thruster for day reboost, depending on mission duration, is discussed. Measurements of emission brightness from the spacecraft could allow determination of the (neutral) density vertical profile in the critical E-layer; the flux and energy in the beam, varying along the tether, allow imaging line-of-sight integrated emissions that mix effects with altitude-dependent neutral density and lead to a brightness peak in the beam footprint at the E-layer. Difficulties in tomographic inversion, to determine the density profile, result from beam broadening, due to elastic collisions, which flattens the peak, and to the highly nonlinear functional dependency of line-of-sight brightness. Some dynamical issues are discussed.

Bridge damage identification from moving load induced deflection based on wavelet transform and Lipschitz exponent

The wavelet transform and Lipschitz exponent perform well in detecting signal singularity.With the bridge crack damage modeled as rotational springs based on fracture mechanics, the deflection time history of the beam under the moving load is determined with a numerical method. The continuous wavelet transformation (CWT) is applied to the deflection of the beam to identify the location of the damage, and the Lipschitz exponent is used to evaluate the damage degree. The influence of different damage degrees,multiple damage, different sensor locations, load velocity and load magnitude are studied.Besides, the feasibility of this method is verified by a model experiment.