Solidly Mounted Resonators with Carbon Nanotube Electrodes for Biosensing Applications

The work reported here shows a direct experimental comparison of the sensitivities of AlN solidly mounted resonators (SMR)-based biosensors fabricated with standard metal electrodes and with carbon nanotube electrodes. SMRs resonating at frequencies around 1.75 GHz have been fabricated, some devices using a thin film of multi-wall carbon nanotubes (CNTs) as the top electrode material and some identical devices using a chromium/gold electrode. Protein solutions with different concentrations were loaded on the top of the resonators and their responses to mass-load from physically adsorbed coatings were investigated. Results show that resonators using CNTs as the top electrode material exhibited higher frequency change for a given load due to the higher active surface area of a thin film of interconnecting CNTs compared to that of a metal thin film electrode and hence exhibited greater mass loading sensitivity. It is therefore concluded that the use of CNT electrodes on resonators for their use as gravimetric biosensors is viable and worthwhile.

Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors

This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended as high impedance films for the acoustic isolation of bulk acoustic wave devices operating in the GHz frequency range. The films are grown by sputtering a metallic tantalum target under different oxygen and argon gas mixtures, total pressures, pulsed DC powers and substrate bias. The structural properties of the films are assessed through infrared absorption spectroscopy and X-ray diffraction measurements. Their acoustic impedance is obtained after estimating the mass density by X-ray reflectometry measurements and the longitudinal acoustic velocity by analyzing the longitudinal λ/2 resonance induced in a tantalum oxide film inserted between an acoustic reflector and an AlN-based resonator. A second measurement of the sound velocity is achieved through picosecond acoustic spectroscopy.

Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators

This work describes the performance of AlN-based bulk acoustic wave resonators built on top of insulating acoustic reflectors and operating at around 8 GHz. The acoustic reflectors are composed of alternate layers of amorphous Ta2O5and SiO2 deposited at room temperature by pulsed-DC reactive sputtering in Ar/O2 atmospheres. SiO2 layers have a porous structure that provides a low acoustic impedance of only 9.5 MRayl. Ta2O5 films exhibit an acoustic impedance of around 39.5 MRayl that was assessed by the picoseconds acoustic technique These values allow to design acoustic mirrors with transmission coefficients in the centre of the band lower than -40 dB (99.998 % of reflectance) with only seven layers. The resonators were fabricated by depositing a very thin AlN film onto an iridium bottom electrode 180 nm-thick and by using Ir or Mo layers as top electrode. Resonators with effective electromechanical coupling factors of 5.7% and quality factors at the antiresonant frequency around 600 are achieved.

Medidas de propiedades dieléctricas de materiales de construcción mediante elipsometría

A set of measurements of electromagnetic properties of building materials is presented in this work. The method is based on the measurement of the polarization state of the reflected signal from the material under study at a fixed angle of incidence. From the measured data, by using the Fresnel equations, it has been obtained the dielectric constant. Measurements were done by using two horn antennas at the frequency of 9 GHz. The obtained results are compared with the free space reflexion and transmission Fresnel method and other reflection methods based on a conductor waveguide. The method explained in this work can be used for other type of materials and its main advantage is the non-destructive character and the ease implementation.

High frequency high-order Rayleigh modes in ZnO/GaAs

Strong high-order Rayleigh or Sezawa modes, in addition to the fundamental Rayleigh mode, have been observed in ZnO/GaAs(001) systems along the [110] propagation direction of GaAs. The dispersion of the different acoustic waves has been calculated and compared to the experimental data. The bandwidth and impedance matching characteristics of the multimode SAW delay lines operating at high frequencies (2.5-3.5 GHz regime) have been investigated.

Multibeam Network Design and Measurement for Triangular Array of Three Radiating Elements

Nowadays, more a more base stations are equipped with active conformal antennas. These antenna designs combine phase shift systems with multibeam networks providing multi-beam ability and interference rejection, which optimize multiple channel systems. GEODA is a conformal adaptive antenna system designed for satellite communications. Operating at 1.7 GHz with circular polarization, it is possible to track and communicate with several satellites at once thanks to its adaptive beam. The antenna is based on a set of similar triangular arrays that are divided in subarrays of three elements called `cells'. Transmission/Receiver (T/R) modules manage beam steering by shifting the phases. A more accurate steering of the antenna GEODA could be achieved by using a multibeam network. Several multibeam network designs based on Butler network will be presented

3x3 Multibeam Network for a Triangular Array of Three Radiating Elements

A multibeam antenna study based on Butler network will be undertaken in this document. These antenna designs combines phase shift systems with multibeam networks to optimize multiple channel systems. The system will work at 1.7 GHz with circular polarization. Specifically, result simulations and measurements of 3 element triangular subarray will be shown. A 45 element triangular array will be formed by the subarrays. Using triangular subarrays, side lobes and crossing points are reduced.

Design and Test of a High QoS Radio Network for CBTC Systems in Subway Tunnels

Communications Based Train Control Systems require high quality radio data communications for train signaling and control. Actually most of these systems use 2.4GHz band with proprietary radio transceivers and leaky feeder as distribution system. All them demand a high QoS radio network to improve the efficiency of railway networks. We present narrow band, broad band and data correlated measurements taken in Madrid underground with a transmission system at 2.4 GHz in a test network of 2 km length in subway tunnels. The architecture proposed has a strong overlap in between cells to improve reliability and QoS. The radio planning of the network is carefully described and modeled with narrow band and broadband measurements and statistics. The result is a network with 99.7% of packets transmitted correctly and average propagation delay of 20ms. These results fulfill the specifications QoS of CBTC systems.

Broadband Channel Long Delay Cluster Measurements and Analysis at 2.4GHz in Subway Tunnels

The delay caused by the reflected ray in broadband communication has a great influence on the communications in subway tunnel. This paper presents measurements taken in subway tunnels at 2.4 GHz, with 5 MHz bandwidth. According to propagation characteristics of tunnel, the measurements were carried out with a frequency domain channel sounding technique, in three typical scenarios: line of sight (LOS), Non-line-of-sight (NLOS) and far line of sight (FLOS), which lead to different delay distributions. Firstly IFFT was chosen to get channel impulse response (CIR) h(t) from measured three-dimensional transfer functions. Power delay profile (PDP) was investigated to give an overview of broadband channel model. Thereafter, a long delay caused by the obturation of tunnel is observed and investigated in all the scenarios. The measurements show that the reflection can be greatly remained by the tunnel, which leads to long delay cluster where the reflection, but direct ray, makes the main contribution for radio wave propagation. Four important parameters: distribution of whole PDP power, first peak arriving time, reflection cluster duration and PDP power distribution of reflection cluster were studied to give a detailed description of long delay characteristic in tunnel. This can be used to ensure high capacity communication in tunnels

Evaluación de las Prestaciones de una Red WiMAX Móvil en un Escenario de Alta Movilidad

The aim of this paper is to evaluate the performance of mobile WiMAX technology for users in a highly mobility scenario for an operating frequency of 3.5 GHz. By utilizing a modified version of the extended Erceg’s propagation model, based on the introduction of Rayleigh fading due to multipath, we have calculated the received desired power and the interference power to obtain the statistical signal-to-interference-plusnoise rate (as a function of mean value and variance of cochannel interference) and the user throughput. A rural scenario composed of a transmitting base station and users in moving vehicles along a cell sector is proposed. The obtained results about coverage and throughput have been simulated by a tool built in MATLAB

Radio-holografía de microondas para la optimización de la superficie de grandes antenas reflectoras

En el presente trabajo de tesis se afronta el problema de la optimización de la superficie de grandes antenas reflectoras. Es sabido que los grandes reflectores, formados por una superficie panelada, sufren deformaciones debidas al impacto del viento, a los cambios de temperatura y a los efectos gravitacionales derivados del gran peso de la estructura. Estos efectos hacen que los reflectores pierdan su forma ideal, generalmente de paraboloide, y se reduzca su eficiencia de apertura y, por tanto, se limite la máxima frecuencia de uso de los mismos. Es necesario, por tanto, disponer de técnicas que permitan medir el estado de la superficie de grandes reflectores, y derivar los ajustes necesarios a aplicar sobre los tornillos de soporte de cada uno de los paneles que conforman dicha superficie. De esta manera, se devolvería al reflector su forma óptima y aumentaría la eficiencia de apertura y el rango de frecuencias de uso. Hay que resaltar que el aumento de la eficiencia de un radiotelescopio supone una reducción en el tiempo de integración necesario para la detección de las debilísimas señales generadas por las radiofuentes naturales, ahorrando así valioso tiempo de observación. Además, el incremento en el rango de frecuencias permite la detección de nuevas líneas o especies moleculares en dichas radiofuentes. Tras un primer capítulo introductorio, se presenta, en el capítulo segundo, la geometría de estos grandes reflectores y la influencia de los distintos factores que afectan a la calidad de la superficie de los mismos, como la gravedad, el viento y la temperatura, particularizando para el caso del radiotelescopio de 40 metros del Centro Astronómico de Yebes. En el tercer capítulo, se presentan las diferentes técnicas metrológicas empleadas actualmente para abordar la determinación de estos ajustes, mostrándose las ventajas e inconvenientes de cada una de ellas. Actualmente, la técnica metrológica más precisa y rápida para llevar a cabo esta tarea de caracterización de la superficie de un gran reflector, es la radio-holografía de microondas presentada en el capítulo cuarto. A partir de las medidas proporcionadas por esta técnica, realizadas con la ayuda de un transmisor, y mediante transformaciones de campo, se calculan los errores de la superficie del reflector, respecto al paraboloide ideal, y se derivan los ajustes necesarios. En los capítulos quinto y sexto se presentan los resultados de la aplicación de esta técnica a dos radiotelescopios: el de 30 metros de IRAM en Pico de Veleta (Granada) y los prototipos de 12 metros de las antenas del proyecto ALMA. Por su parte, el capítulo séptimo contiene el núcleo fundamental de esta tesis y presenta el desarrollo de la técnica de radio-holografía de microondas para optimizar la superficie del radiotelescopio de 40 metros del Centro Astronómico de Yebes. Para ello, ha sido necesario diseñar, construir e instalar un receptor de doble canal en banda Ku en foco primario, y la instrumentación asociada para hacer las medidas de amplitud y fase del diagrama de radiación. Además, ha sido necesario desarrollar el software para llevar a cabo las transformaciones de campo y derivar los ajustes de los paneles. De las medidas holográficas iniciales resultó un error de la superficie del radiotelescopio de 485 μm WRMS, respecto al paraboloide ideal en dirección normal. Tras varias iteraciones del proceso de medida y ajuste, se consiguió reducir dicho error a 194 μm WRMS. Esta notable mejora de la calidad de la superficie ha supuesto aumentar la eficiencia de apertura desde 2,6% al 38,2% a 86 GHz, para un receptor a esta frecuencia situado en el foco primario que produjese la misma iluminación que el receptor de holografía. In this thesis the problem of large reflector antenna surface optimization is faced. It is well known that large reflectors, which are made of a panelled surface, suffer from deformations due to the impact of wind, temperature gradients and gravity loads coming from the high weigth of the structure. These effects distort the ideal reflector shape, which is a paraboloid in most cases, hence reducing the aperture efficiency of the reflector and limiting the maximum frequency of operation. Therefore, it is necessary to have some techniques to measure the status of large reflector surfaces and to derive the adjustment values to be applied to the screws that connect the surface panels to the reflector back-up structure. In this way, the reflector would recover its optimum shape and the aperture efficiency and frequency range would increase. It has to be stated that an increment in the radiotelescope aperture efficiency would imply a reduction in the integration time needed to detect such weak signals coming from natural radiosources in space and, hence, an important saving in observation time. In addition, the increase in the frequency range of operation would allow the detection of new molecular lines in those radiosources. After the introduction, the second chapter shows the geometry of large reflector antennas and the impact on its surface quality of different factors like gravity, wind and temperature, particularly for the case of the Centro Astronómico de Yebes 40 meter radiotelescope. The third chapter deals with the different metrology techniques used to determine the panel adjustments, including the advantages and drawbacks of each one Currently, the most accurate and fast metrologic technique to carry out the characterization of large reflector surfaces is microwave radio-holography2, which is shown in chapter four. From the measurements provided by microwave radio-holography, performed with the help of a transmitter, and with the use of field transformations, the reflector surface errors are computed and the panel adjustments are derived. Chapters five and six show the results of holographic measurements applied to two first class radiotelescopes: the IRAM 30 meter radiotelescope and the 12 meter prototype antennas for the ALMA project. Chapter seven contains the main work of this thesis. It presents the development of the microwave radio-holography technique for the optimization of the Centro Astronómico de Yebes 40m radiotelescope. The work implied the design, construction and instalation of a prime focus Ku-band dual channel receiver, together with the associated instrumentation to measure the amplitude and phase of the radiotelescope radiation pattern. In addition, the software to carry out field transformations and screw settings computations was developed too. Initial holography measurements came up with an surface error of 485 μmWRMS in normal direction with respect to the best-fit paraboloid. After a few iterations of the measurementadjustment cycle, the surface error was reduced to 194 μm WRMS. This remarkable improvement in surface quality means an increment in aperture efficiency from 2,6% to 38,2% at 86 GHz, assuming a receiver at this frequency in prime focus position which produces the same illumination as the holography receiver.

Blind reconiliation

Information reconciliation is a crucial procedure in the classical post-processing of quantum key distribution (QKD). Poor reconciliation e?ciency, revealing more information than strictly needed, may compromise the maximum attainable distance, while poor performance of the algorithm limits the practical throughput in a QKD device. Historically, reconciliation has been mainly done using close to minimal information disclosure but heavily interactive procedures, like Cascade, or using less e?cient but also less interactive ?just one message is exchanged? procedures, like the ones based in low-density parity-check (LDPC) codes. The price to pay in the LDPC case is that good e?ciency is only attained for very long codes and in a very narrow range centered around the quantum bit error rate (QBER) that the code was designed to reconcile, thus forcing to have several codes if a broad range of QBER needs to be catered for. Real world implementations of these methods are thus very demanding, either on computational or communication resources or both, to the extent that the last generation of GHz clocked QKD systems are ?nding a bottleneck in the classical part. In order to produce compact, high performance and reliable QKD systems it would be highly desirable to remove these problems. Here we analyse the use of short-length LDPC codes in the information reconciliation context using a low interactivity, blind, protocol that avoids an a priori error rate estimation. We demonstrate that 2×103 bits length LDPC codes are suitable for blind reconciliation. Such codes are of high interest in practice, since they can be used for hardware implementations with very high throughput.

Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators

We investigate the sputter growth of very thin aluminum nitride (AlN) films on iridium electrodes for electroacoustic devices operating in the super high frequency range. Superior crystal quality and low stress films with thicknesses as low as 160 nm are achieved after a radio frequency plasma treatment of the iridium electrode followed by a two-step alternating current reactive magnetron sputtering of an aluminum target, which promotes better conditions for the nucleation of well textured AlN films in the very first stages of growth. Solidly mounted resonators tuned around 8 GHz with effective electromechanical coupling factors of 5.8% and quality factors Q up to 900 are achieved.

Experimental comparison of FBARs and SMRs responsitivities to mass loadings

The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice between FBARs and SMRs depends primarily on the users' ability to design and fabricate Bragg reflectors and/or membranes, because neither of these two types of resonators has been demonstrated to be superior to the other. In the work reported here, it is shown that identically designed FBARs and SMRs resonating at the same frequency exhibit different responsitivities, Rm, to mass loadings, being the FBARs more responsive than the SMRs. For the specific device design and resonant frequency (~2 GHz) of the resonators presented, FBARs' mass responsitivity is ~20% greater than that of SMRs, and although this value should not be taken as universal for all possible device designs, it clearly indicates that FBAR devices should be favoured over SMRs in gravimetric sensing applications.

Ultra high frequency thin film saw devices

Durante los últimos años el flujo de datos en la transmisión que tiene lugar en los sistemas de comunicación ha aumentado considerablemente de forma que día a día se requieren más aplicaciones trabajando en un rango de frecuencias muy alto (3-30 GHz). Muchos de estos sistemas de comunicación incluyen dispositivos de onda acústica superficial (SAW) y por tanto se hace necesario el aumento de frecuencia a la que éstos trabajan. Pero este incremento de frecuencia de los dispositivos SAW no sólo es utilizado en los sistemas de comunicación, varios tipos de sensores, por ejemplo, aumentan su sensibilidad cuando la frecuencia a la que trabajan también lo hace. Tradicionalmente los dispositivos SAW se han fabricado sobre cuarzo, LiNbO3 y LiTaO3 principalmente. Sin embargo la principal limitación de estos materiales es su velocidad SAW. Además, debido a la alta temperatura a la que se depositan no pueden ser integrados en la tecnología de fabricación CMOS. El uso de la tecnología de capa delgada, en la que un material piezoeléctrico es depositado sobre un substrato, se está utilizando en las últimas décadas para incrementar la velocidad SAW de la estructura y poder obtener dispositivos trabajando en el rango de frecuencias requerido en la actualidad. Por otra parte, esta tecnología podría ser integrada en el proceso de fabricación CMOS. Durante esta tesis nos hemos centrado en la fabricación de dispositivos SAW trabajando a muy alta frecuencia. Para ello, utilizando la tecnología de capa delgada, hemos utilizado la estructura nitruro de aluminio (AlN) sobre diamante que permite conseguir velocidades SAW del sustrato que no se pueden alcanzar con otros materiales. El depósito de AlN se realizó mediante sputtering reactivo. Durante esta tesis se han realizado diferentes experimentos para optimizar dicho depósito de forma que se han obtenido los parámetros óptimos para los cuales se pueden obtener capas de AlN de alta calidad sobre cualquier tipo de sustrato. Además todo el proceso se realizó a baja temperatura para que el procesado de estos dispositivos pueda ser compatible con la tecnología CMOS. Una vez optimizada la estructura AlN/diamante, mediante litografía por haz de electrones se fabricaron resonadores SAW de tamaño nanométrico que sumado a la alta velocidad resultante de la combinación AlN/diamante nos ha permitido obtener dispositivos trabajando en el rango de 10-28 GHz con un alto factor de calidad y rechazo fuera de la banda. Estás frecuencias y prestaciones no han sido alcanzadas por el momento en resonadores de este tipo. Por otra parte, se han utilizado estos dispositivos para fabricar sensores de presión de alta sensibilidad. Estos dispositivos son afectados altamente por los cambios de temperatura. Se realizó también un exhaustivo estudio de cómo se comportan en temperatura estos resonadores, entre -250ºC y 250ºC (rango de temperaturas no estudiado hasta el momento) diferenciándose dos regiones una a muy baja temperatura en la que el dispositivo muestra un coeficiente de retraso en frecuencia (TCF) relativamente bajo y otra a partir de los -100ºC en la que el TCF es similar al observado en la bibliografía. Por tanto, durante esta tesis se ha optimizado el depósito de AlN sobre diamante para que sea compatible con la tecnología CMOS y permita el procesado de dispositivos trabajando a muy alta frecuencia con altas prestaciones para comunicaciones y sensores. ABSTRACT The increasing volume of information in data transmission systems results in a growing demand of applications working in the super-high-frequency band (3–30 GHz). Most of these systems work with surface acoustic wave (SAW) devices and thus there is a necessity of increasing their resonance frequency. Moreover, sensor application includes this kind of devices. The sensitivity of them is proportional with its frequency. Traditionally, quartz, LiNbO3 and LiTaO3 have been used in the fabrication of SAW devices. These materials suffer from a variety of limitations and in particular they have low SAW velocity as well as being incompatible with the CMOS technology. In order to overcome these problems, thin film technology, where a piezoelectric material is deposited on top of a substrate, has been used during the last decades. The piezoelectric/substrate structure allows to reach the frequencies required nowadays and could be compatible with the mass electronic production CMOS technology. This thesis work focuses on the fabrication of SAW devices working in the super-high-frequency range. Thin film technology has been used in order to get it, especially aluminum nitride (AlN) deposited by reactive sputtering on diamond has been used to increase the SAW velocity. Different experiments were carried out to optimize the parameters for the deposit of high quality AlN on any kind of substrates. In addition, the system was optimized under low temperature and thus this process is CMOS compatible. Once the AlN/diamond was optimized, thanks to the used e-beam lithography, nanometric SAW resonators were fabricated. The combination of the structure and the size of the devices allow the fabrication of devices working in the range of 10-28 GHz with a high quality factor and out of band rejection. These high performances and frequencies have not been reached so far for this kind of devices. Moreover, these devices have been used as high sensitivity pressure sensors. They are affected by temperature changes and thus a wide temperature range (-250ºC to 250ºC) study was done. From this study two regions were observed. At very low temperature, the temperature coefficient of frequency (TCF) is low. From -100ºC upwards the TCF is similar to the one appearing in the literature. Therefore, during this thesis work, the sputtering of AlN on diamond substrates was optimized for the CMOS compatible fabrication of high frequency and high performance SAW devices for communication and sensor application.