A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

Multi-Scale Vector-Ridge-Detection for Perceptual Organization Without Edges

We present a novel ridge detector that finds ridges on vector fields. It is designed to automatically find the right scale of a ridge even in the presence of noise, multiple steps and narrow valleys. One of the key features of such ridge detector is that it has a zero response at discontinuities. The ridge detector can be applied to scalar and vector quantities such as color. We also present a parallel perceptual organization scheme based on such ridge detector that works without edges; in addition to perceptual groups, the scheme computes potential focus of attention points at which to direct future processing. The relation to human perception and several theoretical findings supporting the scheme are presented. We also show results of a Connection Machine implementation of the scheme for perceptual organization (without edges) using color.

Local Rotational Symmetries

This thesis describes a new representation for two-dimensional round regions called Local Rotational Symmetries. Local Rotational Symmetries are intended as a companion to Brady's Smoothed Local Symmetry Representation for elongated shapes. An algorithm for computing Local Rotational Symmetry representations at multiple scales of resolution has been implemented and results of this implementation are presented. These results suggest that Local Rotational Symmetries provide a more robustly computable and perceptually accurate description of round regions than previous proposed representations. In the course of developing this representation, it has been necessary to modify the way both Smoothed Local Symmetries and Local Rotational Symmetries are computed. First, grey-scale image smoothing proves to be better than boundary smoothing for creating representations at multiple scales of resolution, because it is more robust and it allows qualitative changes in representations between scales. Secondly, it is proposed that shape representations at different scales of resolution be explicitly related, so that information can be passed between scales and computation at each scale can be kept local. Such a model for multi-scale computation is desirable both to allow efficient computation and to accurately model human perceptions.

Automatically Recovering Geometry and Texture from Large Sets of Calibrated Images

Three-dimensional models which contain both geometry and texture have numerous applications such as urban planning, physical simulation, and virtual environments. A major focus of computer vision (and recently graphics) research is the automatic recovery of three-dimensional models from two-dimensional images. After many years of research this goal is yet to be achieved. Most practical modeling systems require substantial human input and unlike automatic systems are not scalable. This thesis presents a novel method for automatically recovering dense surface patches using large sets (1000's) of calibrated images taken from arbitrary positions within the scene. Physical instruments, such as Global Positioning System (GPS), inertial sensors, and inclinometers, are used to estimate the position and orientation of each image. Essentially, the problem is to find corresponding points in each of the images. Once a correspondence has been established, calculating its three-dimensional position is simply a matter of geometry. Long baseline images improve the accuracy. Short baseline images and the large number of images greatly simplifies the correspondence problem. The initial stage of the algorithm is completely local and scales linearly with the number of images. Subsequent stages are global in nature, exploit geometric constraints, and scale quadratically with the complexity of the underlying scene. We describe techniques for: 1) detecting and localizing surface patches; 2) refining camera calibration estimates and rejecting false positive surfels; and 3) grouping surface patches into surfaces and growing the surface along a two-dimensional manifold. We also discuss a method for producing high quality, textured three-dimensional models from these surfaces. Some of the most important characteristics of this approach are that it: 1) uses and refines noisy calibration estimates; 2) compensates for large variations in illumination; 3) tolerates significant soft occlusion (e.g. tree branches); and 4) associates, at a fundamental level, an estimated normal (i.e. no frontal-planar assumption) and texture with each surface patch.

Understanding Subsystems in Biology through Dimensionality Reduction, Graph Partitioning and Analytical Modeling

Biological systems exhibit rich and complex behavior through the orchestrated interplay of a large array of components. It is hypothesized that separable subsystems with some degree of functional autonomy exist; deciphering their independent behavior and functionality would greatly facilitate understanding the system as a whole. Discovering and analyzing such subsystems are hence pivotal problems in the quest to gain a quantitative understanding of complex biological systems. In this work, using approaches from machine learning, physics and graph theory, methods for the identification and analysis of such subsystems were developed. A novel methodology, based on a recent machine learning algorithm known as non-negative matrix factorization (NMF), was developed to discover such subsystems in a set of large-scale gene expression data. This set of subsystems was then used to predict functional relationships between genes, and this approach was shown to score significantly higher than conventional methods when benchmarking them against existing databases. Moreover, a mathematical treatment was developed to treat simple network subsystems based only on their topology (independent of particular parameter values). Application to a problem of experimental interest demonstrated the need for extentions to the conventional model to fully explain the experimental data. Finally, the notion of a subsystem was evaluated from a topological perspective. A number of different protein networks were examined to analyze their topological properties with respect to separability, seeking to find separable subsystems. These networks were shown to exhibit separability in a nonintuitive fashion, while the separable subsystems were of strong biological significance. It was demonstrated that the separability property found was not due to incomplete or biased data, but is likely to reflect biological structure.

A Detailed Look at Scale and Translation Invariance in a Hierarchical Neural Model of Visual Object Recognition

The HMAX model has recently been proposed by Riesenhuber & Poggio as a hierarchical model of position- and size-invariant object recognition in visual cortex. It has also turned out to model successfully a number of other properties of the ventral visual stream (the visual pathway thought to be crucial for object recognition in cortex), and particularly of (view-tuned) neurons in macaque inferotemporal cortex, the brain area at the top of the ventral stream. The original modeling study only used ``paperclip'' stimuli, as in the corresponding physiology experiment, and did not explore systematically how model units' invariance properties depended on model parameters. In this study, we aimed at a deeper understanding of the inner workings of HMAX and its performance for various parameter settings and ``natural'' stimulus classes. We examined HMAX responses for different stimulus sizes and positions systematically and found a dependence of model units' responses on stimulus position for which a quantitative description is offered. Interestingly, we find that scale invariance properties of hierarchical neural models are not independent of stimulus class, as opposed to translation invariance, even though both are affine transformations within the image plane.

Modeling Invariances in Inferotemporal Cell Tuning

In macaque inferotemporal cortex (IT), neurons have been found to respond selectively to complex shapes while showing broad tuning ("invariance") with respect to stimulus transformations such as translation and scale changes and a limited tuning to rotation in depth. Training monkeys with novel, paperclip-like objects, Logothetis et al. could investigate whether these invariance properties are due to experience with exhaustively many transformed instances of an object or if there are mechanisms that allow the cells to show response invariance also to previously unseen instances of that object. They found object-selective cells in anterior IT which exhibited limited invariance to various transformations after training with single object views. While previous models accounted for the tuning of the cells for rotations in depth and for their selectivity to a specific object relative to a population of distractor objects, the model described here attempts to explain in a biologically plausible way the additional properties of translation and size invariance. Using the same stimuli as in the experiment, we find that model IT neurons exhibit invariance properties which closely parallel those of real neurons. Simulations show that the model is capable of unsupervised learning of view-tuned neurons. The model also allows to make experimentally testable predictions regarding novel stimulus transformations and combinations of stimuli.

Towards Grid-Wide Modeling and Simulation

Modeling and simulation permeate all areas of business, science and engineering. With the increase in the scale and complexity of simulations, large amounts of computational resources are required, and collaborative model development is needed, as multiple parties could be involved in the development process. The Grid provides a platform for coordinated resource sharing and application development and execution. In this paper, we survey existing technologies in modeling and simulation, and we focus on interoperability and composability of simulation components for both simulation development and execution. We also present our recent work on an HLA-based simulation framework on the Grid, and discuss the issues to achieve composability.