Performance-Driven Microfabrication-Oriented Methodology for MEMS Conceptual Design with Application in Microfluidic Device Design

Performance and manufacturability are two important issues that must be taken into account during MEMS design. Existing MEMS design models or systems follow a process-driven design paradigm, that is, design starts from the specification of process sequence or the customization of foundry-ready process template. There has been essentially no methodology or model that supports generic, high-level design synthesis for MEMS conceptual design. As a result, there lacks a basis for specifying the initial process sequences. To address this problem, this paper proposes a performance-driven, microfabrication-oriented methodology for MEMS conceptual design. A unified behaviour representation method is proposed which incorporates information of both physical interactions and chemical/biological/other reactions. Based on this method, a behavioural process based design synthesis model is proposed, which exploits multidisciplinary phenomena for design solutions, including both the structural components and their configuration for the MEMS device, as well as the necessary substances for the chemical/biological/other reactions. The model supports both forward and backward synthetic search for suitable phenomena. To ensure manufacturability, a strategy of using microfabrication-oriented phenomena as design knowledge is proposed, where the phenomena are developed from existing MEMS devices that have associated MEMS-specific microfabrication processes or foundry-ready process templates. To test the applicability of the proposed methodology, the paper also studies microfluidic device design and uses a micro-pump design for the case study.

A Concurrent Smalltalk Compiler for the Message-Driven Processor

This thesis describes Optimist, an optimizing compiler for the Concurrent Smalltalk language developed by the Concurrent VLSI Architecture Group. Optimist compiles Concurrent Smalltalk to the assembly language of the Message-Driven Processor (MDP). The compiler includes numerous optimization techniques such as dead code elimination, dataflow analysis, constant folding, move elimination, concurrency analysis, duplicate code merging, tail forwarding, use of register variables, as well as various MDP-specific optimizations in the code generator. The MDP presents some unique challenges and opportunities for compilation. Due to the MDP's small memory size, it is critical that the size of the generated code be as small as possible. The MDP is an inherently concurrent processor with efficient mechanisms for sending and receiving messages; the compiler takes advantage of these mechanisms. The MDP's tagged architecture allows very efficient support of object-oriented languages such as Concurrent Smalltalk. The initial goals for the MDP were to have the MDP execute about twenty instructions per method and contain 4096 words of memory. This compiler shows that these goals are too optimistic -- most methods are longer, both in terms of code size and running time. Thus, the memory size of the MDP should be increased.

Concurrent Smalltalk on the Message-Driven Processor

Concurrent Smalltalk is the primary language used for programming the J- Machine, a MIMD message-passing computer containing thousands of 36-bit processors connected by a very low latency network. This thesis describes in detail Concurrent Smalltalk and its implementation on the J-Machine, including the Optimist II global optimizing compiler and Cosmos fine-grain parallel operating system. Quantitative and qualitative results are presented.

Numerical Simulation of Electroosmotic Flow with Step Change in Zeta Potential

Electroosmotic flow is a convenient mechanism for transporting polar fluid in a microfluidic device. The flow is generated through the application of an external electric field that acts on the free charges that exists in a thin Debye layer at the channel walls. The charge on the wall is due to the chemistry of the solid-fluid interface, and it can vary along the channel, e.g. due to modification of the wall. This investigation focuses on the simulation of the electroosmotic flow (EOF) profile in a cylindrical microchannel with step change in zeta potential. The modified Navier-Stoke equation governing the velocity field and a non-linear two-dimensional Poisson-Boltzmann equation governing the electrical double-layer (EDL) field distribution are solved numerically using finite control-volume method. Continuities of flow rate and electric current are enforced resulting in a non-uniform electrical field and pressure gradient distribution along the channel. The resulting parabolic velocity distribution at the junction of the step change in zeta potential, which is more typical of a pressure-driven velocity flow profile, is obtained.