Effects of Platinum on NiPtSiGe/n-SiGe and NiPtSi/n-Si Schottky Contacts

Solid phase reaction of NiPt/Si and NiPt/SiGe is one of the key issues for silicide (germanosilicide) technology. Especially, the NiPtSiGe, in which four elements are involved, is a very complex system. As a result, a detailed study is necessary for the interfacial reaction between NiPt alloy film and SiGe substrate. Besides using traditional material characterization techniques, characterization of Schottky diode is a good measure to detect the interface imperfections or defects, which are not easy to be found on large area blanket samples. The I-V characteristics of 10nm Ni(Pt=0, 5, 10 at.%) germanosilicides/n-Si₀/₇Ge₀.₃ and silicides/n-Si contact annealed at 400 and 500°C were studied. For Schottky contact on n-Si, with the addition of Pt in the Ni(Pt) alloy, the Schottky barrier height (SBH) increases greatly. With the inclusion of a 10% Pt, SBH increases ~0.13 eV. However, for the Schottky contacts on SiGe, with the addition of 10% Pt, the increase of SBH is only ~0.04eV. This is explained by pinning of the Fermi level. The forward I-V characteristics of 10nm Ni(Pt=0, 5, 10 at.%)SiGe/SiGe contacts annealed at 400°C were investigated in the temperature range from 93 to 300K. At higher temperature (>253K) and larger bias at low temperature (<253K), the I-V curves can be well explained by a thermionic emission model. At lower temperature, excess currents at lower forward bias region occur, which can be explained by recombination/generation or patches due to inhomogenity of SBH with pinch-off model or a combination of the above mechanisms.

Understanding Simple Picture Programs

What are the characteristics of the process by which an intent is transformed into a plan and then a program? How is a program debugged? This paper analyzes these questions in the context of understanding simple turtle programs. To understand and debug a program, a description of its intent is required. For turtle programs, this is a model of the desired geometric picture. a picture language is provided for this purpose. Annotation is necessary for documenting the performance of a program in such a way that the system can examine the procedures behavior as well as consider hypothetical lines of development due to tentative debugging edits. A descriptive framework representing both causality and teleology is developed. To understand the relation between program and model, the plan must be known. The plan is a description of the methodology for accomplishing the model. Concepts are explicated for translating the global intent of a declarative model into the local imperative code of a program. Given the plan, model and program, the system can interpret the picture and recognize inconsistencies. The description of the discrepancies between the picture actually produced by the program and the intended scene is the input to a debugging system. Repair of the program is based on a combination of general debugging techniques and specific fixing knowledge associated with the geometric model primitives. In both the plan and repairing the bugs, the system exhibits an interesting style of analysis. It is capable of debugging itself and reformulating its analysis of a plan or bug in response to self-criticism. In this fashion, it can qualitatively reformulate its theory of the program or error to account for surprises or anomalies.