Process Variability in Micro-Embossing

A promising technique for the large-scale manufacture of micro-fluidic devices and photonic devices is hot embossing of polymers such as PMMA. Micro-embossing is a deformation process where the workpiece material is heated to permit easier material flow and then forced over a planar patterned tool. While there has been considerable, attention paid to process feasibility very little effort has been put into production issues such as process capability and eventual process control. In this paper, we present initial studies aimed at identifying the origins and magnitude of variability for embossing features at the micron scale in PMMA. Test parts with features ranging from 3.5- 630 µm wide and 0.9 µm deep were formed. Measurements at this scale proved very difficult, and only atomic force microscopy was able to provide resolution sufficient to identify process variations. It was found that standard deviations of widths at the 3-4 µm scale were on the order of 0.5 µm leading to a coefficient of variation as high as 13%. Clearly, the transition from test to manufacturing for this process will require understanding the causes of this variation and devising control methods to minimize its magnitude over all types of parts.

Computer System for Visual Recognition Using Active Knowledge

A system for visual recognition is described, with implications for the general problem of representation of knowledge to assist control. The immediate objective is a computer system that will recognize objects in a visual scene, specifically hammers. The computer receives an array of light intensities from a device like a television camera. It is to locate and identify the hammer if one is present. The computer must produce from the numerical "sensory data" a symbolic description that constitutes its perception of the scene. Of primary concern is the control of the recognition process. Control decisions should be guided by the partial results obtained on the scene. If a hammer handle is observed this should suggest that the handle is part of a hammer and advise where to look for the hammer head. The particular knowledge that a handle has been found combines with general knowledge about hammers to influence the recognition process. This use of knowledge to direct control is denoted here by the term "active knowledge". A descriptive formalism is presented for visual knowledge which identifies the relationships relevant to the active use of the knowledge. A control structure is provided which can apply knowledge organized in this fashion actively to the processing of a given scene.