Performance-Driven Microfabrication-Oriented Methodology for MEMS Conceptual Design with Application in Microfluidic Device Design

Performance and manufacturability are two important issues that must be taken into account during MEMS design. Existing MEMS design models or systems follow a process-driven design paradigm, that is, design starts from the specification of process sequence or the customization of foundry-ready process template. There has been essentially no methodology or model that supports generic, high-level design synthesis for MEMS conceptual design. As a result, there lacks a basis for specifying the initial process sequences. To address this problem, this paper proposes a performance-driven, microfabrication-oriented methodology for MEMS conceptual design. A unified behaviour representation method is proposed which incorporates information of both physical interactions and chemical/biological/other reactions. Based on this method, a behavioural process based design synthesis model is proposed, which exploits multidisciplinary phenomena for design solutions, including both the structural components and their configuration for the MEMS device, as well as the necessary substances for the chemical/biological/other reactions. The model supports both forward and backward synthetic search for suitable phenomena. To ensure manufacturability, a strategy of using microfabrication-oriented phenomena as design knowledge is proposed, where the phenomena are developed from existing MEMS devices that have associated MEMS-specific microfabrication processes or foundry-ready process templates. To test the applicability of the proposed methodology, the paper also studies microfluidic device design and uses a micro-pump design for the case study.

Bubble Behavior in a Taylor Vortex

We present an experimental study on the behavior of bubbles captured in a Taylor vortex. The gap between a rotating inner cylinder and a stationary outer cylinder is filled with a Newtonian mineral oil. Beyond a critical rotation speed (ω[subscript c]), Taylor vortices appear in this system. Small air bubbles are introduced into the gap through a needle connected to a syringe pump. These are then captured in the cores of the vortices (core bubble) and in the outflow regions along the inner cylinder (wall bubble). The flow field is measured with a two-dimensional particle imaging velocimetry (PIV) system. The motion of the bubbles is monitored by using a high speed video camera. It has been found that, if the core bubbles are all of the same size, a bubble ring forms at the center of the vortex such that bubbles are azimuthally uniformly distributed. There is a saturation number (N[subscript s]) of bubbles in the ring, such that the addition of one more bubble leads eventually to a coalescence and a subsequent complicated evolution. Ns increases with increasing rotation speed and decreasing bubble size. For bubbles of non-uniform size, small bubbles and large bubbles in nearly the same orbit can be observed to cross due to their different circulating speeds. The wall bubbles, however, do not become uniformly distributed, but instead form short bubble-chains which might eventually evolve into large bubbles. The motion of droplets and particles in a Taylor vortex was also investigated. As with bubbles, droplets and particles align into a ring structure at low rotation speeds, but the saturation number is much smaller. Moreover, at high rotation speeds, droplets and particles exhibit a characteristic periodic oscillation in the axial, radial and tangential directions due to their inertia. In addition, experiments with non-spherical particles show that they behave rather similarly. This study provides a better understanding of particulate behavior in vortex flow structures.