24 resultados para Vacuum Microelectronics


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Item 256-B.

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An electrical discharge is used as a trap for a diffusion pump using DC-704 silicone pump fluid. The discharge cracks the pump fluid vapor thus taking it out of the system. In the process much hydrogen and some other lighter gases are evolved.

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Includes bibliographical references.

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"A Consumer publication from the General Services Administration."

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Bibliography: p. [199]