Doped nanostructured semiconductors produced by cold plasma combined with heat


Autoria(s): Rubin De Celis Leal, David
Contribuinte(s)

Dai, Xiujuan J.

Data(s)

01/08/2016

Resumo

The potential of combining cold plasma and thermal treatment for the nanofabrication of advances semiconductors was investigated.

Identificador

http://hdl.handle.net/10536/DRO/DU:30089186

Idioma(s)

eng

Publicador

Deakin Univeristy, Institute for Frontier Materials

Relação

http://dro.deakin.edu.au/eserv/DU:30089186/decelisleal-license-2016.pdf

http://dro.deakin.edu.au/eserv/DU:30089186/rubindecelisleal-doped-2016A.pdf

Direitos

The Author. All Rights Reserved

Palavras-Chave #nanofabrication #semiconductors #plasma reactive nitrogen species
Tipo

Thesis