Comparison of High Q microresonators operating on a thin plate mode : the Lamé-mode

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The modern communications means use a wide range of frequencies to transmit, code or decrypt information. These tasks are usually performed via different micro-electro-mechanical system (MEMS). The aim of this paper is to present and compare different design of microresonators realized in single crystal silicon using Deep Reactive Ion Etching (DRIE) techniques. The devices are electrostatically driven and use a thin plate mechanical mode: the Lamé-mode. This mode depends on the geometric dimensions of the vibrating plate and grants a high quality factor for each device. The characterization has been carried out under an optical test bench using a heterodyne laser probe. The results show a quality factor between 1000 to 4500 at 10.3 MHz in air.