Modeling study of scanning capacitance microscopy measurement for P-N junction dopant profile extraction

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Autoria(s): Yang, J.; Yeow, T.Y.T.

Contribuinte(s)	B. Li G. Ru X. Qu P. Yu H. Iwai
Data(s)	01/01/2001
Identificador	http://espace.library.uq.edu.au/view/UQ:96078
Idioma(s)	eng
Publicador	IEEE
Palavras-Chave	#EX #290902 Integrated Circuits #671201 Integrated circuits and devices
Tipo	Conference Paper